KLA Tencor 720-06888-000焦点控制板机箱

KLA-Tencor 720-06888-000焦点控制板机箱

1.产 品 资 料 介 绍：

中文资料：

一、产品功能概述

KLA Tencor 720-06888-000 是专用于 CD-SEM（临界尺寸扫描电子显微镜）系统 中的“焦点控制板机箱”。它的核心功能是：

• 提供物理安装环境和电源接口用于安装焦点控制电路板；

• 管理和稳定电子束在扫描过程中对焦系统的操作；

• 支持自动聚焦系统，实现高分辨率图像采集；

• 与主控制板和图像处理板协同，用于实时聚焦反馈和电压控制。

二、典型应用领域

1. 半导体制造设备

   • 用于 KLA Tencor CD-SEM 系列设备中，如 8100XP、8100XPR、8250 等；

   • 支持晶圆缺陷检测、图像增强、临界尺寸测量等关键工序。

2. 工艺控制与设备维护

   • 被集成于对焦子系统中，对图像采集时的聚焦稳定性起到关键作用；

   • 在研发和生产过程中辅助实现工艺窗口控制与过程一致性。

3. 设备部件更换/维护

   • 当焦点系统存在偏差、失焦、聚焦漂移等问题时，该机箱与其内部板卡常被作为维修/替换对象。

三、相关说明

• 零件编号：720-06888-000（有时也标注为 720-06888-001 Rev.A）

• 所属系统：主要配套 CD-SEM 系列仪器

• 常见配套板卡：聚焦控制板、电压调节板、信号反馈单元

• 通常为内部 OEM 专用件，仅通过授权渠道或原厂技术支持获取

英文资料：

1、 Product Function Overview

KLA Tencor 720-06888-000 is a "focus control board chassis" specifically designed for CD-SEM (critical dimension scanning electron microscope) systems. Its core function is:

Provide a physical installation environment and power interface for installing the focus control circuit board;

Manage and stabilize the operation of the focusing system during the scanning process of the electron beam;

Support automatic focusing system to achieve high-resolution image acquisition;

Collaborate with the main control board and image processing board for real-time focus feedback and voltage control.

2、 Typical application areas

Semiconductor Manufacturing Equipment

Used in KLA Tencor CD-SEM series equipment, such as 8100XP, 8100XPR, 8250, etc;

Support critical processes such as wafer defect detection, image enhancement, and critical dimension measurement.

Process control and equipment maintenance

Integrated into the focusing subsystem, it plays a crucial role in the focusing stability during image acquisition;

Assist in achieving process window control and process consistency during research and production processes.

Equipment component replacement/maintenance

When there are problems such as deviation, defocusing, and focus drift in the focus system, the chassis and its internal boards are often used as repair/replacement objects.

3、 Related instructions

Part number: 720-06888-000 (sometimes also labeled as 720-06888-001 Rev. A)

System: Mainly equipped with CD-SEM series instruments

Common supporting boards: Focus control board, voltage regulation board, signal feedback unit

Usually internal OEM specific parts, obtained only through authorized channels or original factory technical support

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218