KLA Tencor 710-450320-00控制器
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-450320-00 控制器 是一款集成于KLA Tencor精密检测设备中的关键控制模块，主要用于协调设备中多个子系统的运行，如运动控制、信号同步、数据通信及传感器驱动等。该控制器广泛应用于KLA的光学检测、缺陷分析及量测系统中，属于710系列产品架构的一部分。
一、产品基本信息
产品型号：710-450320-00
产品类型：控制器（Controller Module）
品牌厂商：KLA Tencor
所属系列：710系列控制架构
功能定位：中枢控制模块（负责运动控制、数据同步、系统管理）
二、典型应用领域
1. 晶圆表面缺陷检测系统
控制光学扫描平台、图像采集组件的协调动作。
管理照明控制、相机触发、同步扫描等流程。
2. 自动光学检测（AOI）设备
用于高速图像采集系统的触发与采样控制。
控制平台移动与镜头系统聚焦等动作。
3. 量测系统与形貌分析设备
实现亚微米级或纳米级运动精度控制，支持Z轴移动、倾斜补偿等。
控制激光干涉仪模块、线性平台或旋转轴设备。
4. 内部机械子系统控制
控制晶圆搬运机械臂、对位系统、转运单元等自动化组件。
实现工艺过程的自动切换、复位、位置检测等操作。
英文资料：
The KLA Tencor 710-450320-00 controller is a key control module integrated into the KLA Tencor precision inspection equipment, mainly used to coordinate the operation of multiple subsystems in the equipment, such as motion control, signal synchronization, data communication, and sensor driving. This controller is widely used in KLA's optical inspection, defect analysis, and measurement systems, and is part of the 710 series product architecture.
1、 Basic Product Information
Product model: 710-450320-00
Product type: Controller Module
Brand manufacturer: KLA Tencor
Series: 710 Series Control Architecture
Functional positioning: Central control module (responsible for motion control, data synchronization, system management)
2、 Typical application areas
1. Wafer surface defect detection system
Control the coordinated actions of the optical scanning platform and image acquisition components.
Manage processes such as lighting control, camera triggering, and synchronous scanning.
2. Automatic Optical Inspection (AOI) equipment
Triggering and sampling control for high-speed image acquisition systems.
Control platform movement and camera system focusing and other actions.
3. Measurement system and morphology analysis equipment
Realize sub micron or nanometer level motion accuracy control, support Z-axis movement, tilt compensation, etc.
Control laser interferometer modules, linear platforms, or rotating axis equipment.
4. Internal mechanical subsystem control
Control automation components such as wafer handling robotic arms, alignment systems, and transfer units.
Implement automatic switching, reset, position detection and other operations in the process of manufacturing.
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
