Novellus Systems 03-164888-00转换器板
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-164888-00 转换器板（Converter Board） 是用于 Novellus 半导体设备中的专用电子模块，主要负责电信号的格式转换、逻辑电平匹配、接口协议中继等功能，通常作为主控制系统与子系统之间的数据桥梁或信号适配器，确保系统内不同模块之间能够稳定通信与协同工作。
一、产品基本信息
产品型号：03-164888-00
产品名称：转换器板（Converter Board）
制造商：Novellus Systems（现为 Lam Research 旗下品牌）
主要功能：电信号/通信协议/电平的转换与适配
典型用途：嵌于 CVD、PVD、PECVD 等 Novellus 工艺设备中，用于信号分配与接口匹配
二、核心功能与用途
| 功能类别 | 描述 |
|---|---|
| 通信协议转换 | 将来自主控系统的通信信号（如 TTL、RS-232/485）转换为下游模块所需格式（如差分信号、模拟量等）。 |
| 信号电平匹配 | 在高/低电平系统之间提供接口电压缓冲，避免信号损坏。 |
| 接口类型中继 | 实现各种物理端口（DB9、RJ45、排针等）之间的逻辑连接。 |
| 系统隔离保护 | 提供电气隔离，避免高压或干扰信号影响主控系统稳定运行。 |
| 信号整形/放大 | 对长距离或高阻抗信号进行整形放大，提升系统响应速度和抗干扰能力。 |
三、典型应用场景
该转换器板通常用于以下 Novellus 系列设备中：
Concept 系列（CVD）
ALTUS（W 材料沉积）
INOVA / SPEED（PVD / PECVD）
在系统中执行以下任务：
控制主板与 I/O 接口板之间的信号转换
RF 控制单元与等离子功率调节电路之间的接口适配
真空系统信号（如压力传感器、电磁阀）与中央控制器之间的数据连接
将光耦/继电器输出转为系统可识别的标准逻辑电平输入
英文资料：
The Novellus Systems 03-164888-00 Converter Board is a specialized electronic module used in Novellus semiconductor equipment, mainly responsible for format conversion of electrical signals, logic level matching, interface protocol relay and other functions. It is usually used as a data bridge or signal adapter between the main control system and subsystems, ensuring stable communication and collaborative work between different modules in the system.
1、 Basic Product Information
Product model: 03-164888-00
Product Name: Converter Board
Manufacturer: Novellus Systems (now a brand under Lam Research)
Main function: Conversion and adaptation of electrical signals/communication protocols/levels
Typical use: Embedded in Novellus process equipment such as CVD, PVD, PECVD, etc., used for signal distribution and interface matching
2、 Core functions and purposes
Functional category description
Communication protocol conversion converts communication signals from the main control system (such as TTL, RS-232/485) into the format required by downstream modules (such as differential signals, analog signals, etc.).
Signal level matching provides interface voltage buffering between high/low level systems to avoid signal damage.
Interface type relay realizes logical connections between various physical ports (DB9, RJ45, pin headers, etc.).
System isolation protection provides electrical isolation to prevent high voltage or interference signals from affecting the stable operation of the main control system.
Signal shaping/amplification is used to shape and amplify long-distance or high impedance signals, improving system response speed and anti-interference ability.
3、 Typical application scenarios
This converter board is typically used in the following Novellus series devices:
Concept series (CVD)
ALTUS (W-material deposition)
INOVA / SPEED（PVD / PECVD）
Perform the following tasks in the system:
Signal conversion between control motherboard and I/O interface board
Interface adaptation between RF control unit and plasma power regulation circuit
Data connection between vacuum system signals (such as pressure sensors, solenoid valves) and the central controller
Convert the output of the optocoupler/relay into a system recognizable standard logic level input
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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