Novellus Systems 03-283968-00矢量板
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-283968-00 矢量板（Vector Board） 是一款用于 Novellus 半导体制造设备中的专用信号分配与集成接口板。作为一种“高密度信号桥接平台”，该模块承担多个子系统之间的复杂信号集成、中继、分配与隔离转换任务，广泛用于 CVD、ALD、PVD 等设备的工艺控制系统中。
一、基本信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 矢量板（Vector Interface Board） |
| 型号 | 03-283968-00 |
| 制造商 | Novellus Systems Inc.（现为 Lam Research） |
| 部件类型 | 控制/I/O 信号集中板、高通道接口模块 |
| 用途 | 信号汇总、中继传输、模块互联与分配 |
二、核心功能
| 功能类别 | 描述 |
|---|---|
| 信号中继与集中 | 将来自多个控制器/执行器/传感器的信号集中管理 |
| 分通道分发 | 将主控信号按功能分发至目标模块（如加热器、真空阀、MFC 等） |
| 接口转换 | TTL ↔ CMOS、RS-232/485 ↔ 串行/并行接口等协议转换 |
| 电气隔离保护 | 板载光耦、电涌保护、TVS 抑制器、防错接等电路 |
| 多通道并行处理 | 支持数十至上百通道同时运作，适应复杂工艺系统控制需求 |
三、典型应用平台（推测）
该板可能用于以下 Novellus 系列设备：
Concept Two / Concept Three CVD 系列
ALTUS ALD 系统（铜或钨沉积）
Speed 系列高通量沉积设备
INOVA 系列金属沉积系统
在这些平台中，03-283968-00 矢量板主要服务于以下控制子系统：
温控系统（加热器、热电偶反馈）
MFC/气体流量控制单元
真空系统（真空阀、压力传感器）
安全互锁与报警反馈系统
工艺腔室执行器与位置检测单元
英文资料：
The Novellus Systems 03-283968-00 Vector Board is a specialized signal distribution and integration interface board used in Novellus semiconductor manufacturing equipment. As a high-density signal bridging platform, this module undertakes complex signal integration, relay, distribution, and isolation conversion tasks between multiple subsystems, and is widely used in process control systems for CVD, ALD, PVD, and other equipment.
1、 Basic Information
Project Content
Product Name: Vector Interface Board
Model 03-283968-00
Manufacturer Novellus Systems Inc. (now Lam Research)
Component type control/I/O signal centralized board, high channel interface module
Application signal summary, relay transmission, module interconnection and allocation
2、 Core functions
Functional category description
Signal relay and centralized management of signals from multiple controllers/actuators/sensors
Channel distribution distributes the main control signal to target modules (such as heaters, vacuum valves, MFCs, etc.) according to their functions
Interface conversion TTL ↔ CMOS、RS-232/485 ↔ Serial/parallel interface protocol conversion
Electrical isolation protection board for onboard optocouplers, surge protection, TVS suppressors, anti misconnection circuits, etc
Multi channel parallel processing supports simultaneous operation of tens to hundreds of channels, adapting to the control requirements of complex process systems
3、 Typical application platform (speculated)
This board may be used for the following Novellus series devices:
Concept Two/Concept Three CVD Series
ALTUS ALD system (copper or tungsten deposition)
Speed series high-throughput deposition equipment
INOVA series metal deposition system
Among these platforms, the 03-283968-00 vector board mainly serves the following control subsystems:
Temperature control system (heater, thermocouple feedback)
MFC/gas flow control unit
Vacuum system (vacuum valve, pressure sensor)
Security interlock and alarm feedback system
Process chamber actuator and position detection unit
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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