Novellus Systems 03-10484-00接口板
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-10484-00 接口板（Interface Board） 是一款用于 Novellus 半导体设备中的专用电子模块，主要承担系统中控制信号的中转、转换与接口连接功能。该接口板作为多个子系统之间的信号“枢纽”，在工艺控制流程中扮演关键角色。
一、基本信息
| 项目 | 内容 |
|---|---|
| 产品名称 | 接口板（Interface Board） |
| 产品型号 | 03-10484-00 |
| 制造商 | Novellus Systems Inc.（现为 Lam Research） |
| 应用类型 | 控制信号桥接 / 输入输出接口模块 |
| 常用系统 | Concept 系列、ALTUS 系列、INOVA 系列等 CVD/PVD/ALD 设备 |
二、核心功能
| 功能类别 | 功能说明 |
|---|---|
| 信号桥接 | 在主控系统与外设之间传输控制信号、状态信号 |
| 多通道 I/O 管理 | 接入多个传感器、执行器、阀控器、温控单元等 |
| 协议/电平转换 | 在 TTL、RS232、RS485 等不同通信格式之间转换 |
| 信号隔离 | 防止高压或干扰信号直接影响主控制电路 |
| 故障诊断接口 | 部分版本带有板载状态指示灯或测试点，便于维护 |
三、典型应用场景
该接口板主要服务于以下系统中的控制链路层：
工艺气体控制单元（MFC控制）
压力监测系统
加热/冷却平台控制模块
真空泵控制与反馈
腔体阀门执行器驱动
安全联锁与门锁系统
英文资料：
The Novellus Systems 03-10484-00 Interface Board is a specialized electronic module used in Novellus semiconductor equipment, mainly responsible for the transfer, conversion, and interface connection functions of control signals in the system. This interface board serves as a signal hub between multiple subsystems and plays a critical role in the process control flow.
1、 Basic Information
Project Content
Product Name: Interface Board
Product model 03-10484-00
Manufacturer Novellus Systems Inc. (now Lam Research)
Application Type Control Signal Bridge/Input/Output Interface Module
Common systems include Concept series, ALTUS series, INOVA series, and other CVD/PVD/ALD equipment
2、 Core functions
Function Category Function Description
Signal bridging transfers control signals and status signals between the main control system and peripherals
Multi channel I/O management connects multiple sensors, actuators, valve controllers, temperature control units, etc
Protocol/level conversion between different communication formats such as TTL, RS232, RS485, etc
Signal isolation prevents high voltage or interference signals from directly affecting the main control circuit
Some versions of the fault diagnosis interface come with onboard status indicator lights or test points for easy maintenance
3、 Typical application scenarios
This interface board mainly serves the control link layer in the following systems:
Process Gas Control Unit (MFC Control)
Pressure monitoring system
Heating/cooling platform control module
Vacuum pump control and feedback
Chamber valve actuator drive
Safety interlock and door lock system
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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