Novellus Systems 03-137064-00接口矢量板
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-137064-00 接口矢量板（Interface Vector Board） 是一款专为 Novellus 半导体设备定制的高密度信号接口板，主要用于工艺控制系统中多通道信号的输入/输出连接和分配。该板被设计用于将复杂的控制信号（通常是工艺相关的模拟和数字信号）从主控制系统分发到多个子模块，或从多个传感器集中输入到控制系统。
一、基本信息
| 项目 | 内容 |
|---|---|
| 产品型号 | 03-137064-00 |
| 产品名称 | 接口矢量板（Interface Vector Board） |
| 制造商 | Novellus Systems Inc.（现属 Lam Research） |
| 所属类别 | 高通道密度信号接口板 |
| 典型用途 | I/O 信号分配、集中接线、多模块信号桥接 |
二、核心功能
| 功能类别 | 描述 |
|---|---|
| 高密度信号接入 | 提供大量通道支持，连接多组传感器、执行器或信号控制线 |
| 信号矢量分配 | 将来自主控的信号按工艺逻辑分发到不同的设备控制节点（如阀门、电加热、压力控制等） |
| 集中接线平台 | 作为接口中转板，用于集中布线、方便维修、扩展或重新配置 |
| 信号隔离保护 | 板载光耦、保护电路，防止静电、电涌等对控制系统的影响 |
| 可扩展性强 | 设计支持模块化扩展，可接多条排线至背板或前端面板 |
三、典型应用设备
此板常用于 Novellus 的下列设备平台中：
Concept Two / Three 系列 CVD 系统
ALTUS ALD 系列金属沉积系统
INOVA PVD 系统
Speed 系列（SACVD/HDPCVD）
主要安装在：
主控制柜（Main Control Cabinet）
IO 配线区（I/O Interconnect Panel）
工艺腔体外围配线板组（Chamber Harness Connection）
英文资料：
The Novellus Systems 03-137064-00 Interface Vector Board is a high-density signal interface board specifically designed for Novellus semiconductor equipment. It is mainly used for the input/output connection and distribution of multi-channel signals in process control systems. This board is designed to distribute complex control signals (usually process related analog and digital signals) from the main control system to multiple submodules, or input them from multiple sensors into the control system.
1、 Basic Information
Project Content
Product model 03-137064-00
Product Name: Interface Vector Board
Manufacturer Novellus Systems Inc. (now part of Lam Research)
Category: High channel density signal interface board
Typical applications include I/O signal distribution, centralized wiring, and multi module signal bridging
2、 Core functions
Functional category description
High density signal access provides a large number of channel support, connecting multiple groups of sensors, actuators, or signal control lines
Signal vector allocation distributes signals from the main control to different equipment control nodes (such as valves, electric heating, pressure control, etc.) according to process logic
The centralized wiring platform serves as an interface transfer board for centralized wiring, convenient maintenance, expansion, or reconfiguration
Signal isolation protection board includes optocouplers and protection circuits to prevent the impact of static electricity, power surges, and other factors on the control system
Highly scalable design supports modular expansion and can connect multiple cables to the backplane or front panel
3、 Typical application devices
This board is commonly used in the following device platforms of Novellus:
Concept Two/Three series CVD systems
ALTUS ALD series metal deposition system
INOVA PVD system
Speed series (SACVD/HDPCVD)
Mainly installed in:
Main Control Cabinet
IO Interconnect Panel
Process chamber peripheral wiring board group (Chamber Harness Connection)
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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