TEL Tokyo Electron 381-639506-4限制板

TEL Tokyo Electron  381-639506-4限制板

1.产 品 资 料 介 绍：

中文资料：

产品名称：TEL Tokyo Electron 381-639506-4 限制板
功能类型：Limiter Board（信号/功率限制保护模块）

一、主要功能

• 控制和限制电压、电流或信号幅度，防止设备因超出额定参数而损坏

• 提供过载保护与信号钳制功能，确保系统稳定运行

• 支持与主控系统或I/O接口板协同工作，进行实时保护与异常切断

二、典型应用领域

1. 半导体设备内部保护系统

   • 用于TEL设备中对关键控制信号的安全限制

   • 防止电源、电信号、电磁波等干扰引起设备异常

2. 离子注入设备（Ion Implanter）

   • 对高能束流或高压组件进行电流/电压限制

   • 保护离子源、控制电极及目标晶圆区的安全

3. 等离子体刻蚀设备（Plasma Etcher）

   • 限制高频信号输入，避免对RF电路产生干扰或损伤

4. 薄膜沉积设备（如CVD、ALD系统）

   • 保障等离子源、电加热系统、气体传感器的工作电压范围安全

5. 光刻设备（Photolithography）

   • 限制曝光系统的电气负载，保护光源驱动电路

6. 温控与真空控制单元

   • 限制反馈控制信号范围，避免因传感器故障导致温度或真空异常变化

三、应用优势

• 避免瞬态电流或电压冲击造成的设备损坏

• 延长设备关键部件寿命

• 提高生产工艺稳定性，提升良率

• 实现与TEL设备高度匹配的安全防护机制

英文资料：

Product Name: TEL Tokyo Electron 381-639506-4 Restriction Board

Function type: Limiter Board (signal/power limit protection module)

1、 Main functions

Control and limit voltage, current, or signal amplitude to prevent equipment damage due to exceeding rated parameters

Provide overload protection and signal clamping functions to ensure stable system operation

Support collaboration with the main control system or I/O interface board for real-time protection and abnormal disconnection

2、 Typical application areas

Internal protection system for semiconductor equipment

Used for safety restrictions on critical control signals in TEL devices

Prevent equipment abnormalities caused by interference from power sources, electrical signals, electromagnetic waves, etc

Ion implantation equipment

Limiting the current/voltage of high-energy beams or high-voltage components

Protecting the safety of ion sources, control electrodes, and target wafer areas

Plasma Etcher equipment

Limit high-frequency signal input to avoid interference or damage to RF circuits

Thin film deposition equipment (such as CVD, ALD systems)

Ensure the safe working voltage range of plasma sources, electric heating systems, and gas sensors

Photolithography equipment

Limit the electrical load of the exposure system and protect the light source drive circuit

Temperature control and vacuum control unit

Limit the range of feedback control signals to avoid abnormal temperature or vacuum changes caused by sensor failures

3、 Application advantages

Avoid equipment damage caused by transient currents or voltage surges

Extend the lifespan of critical components in equipment

Improve production process stability and increase yield

Implement a security protection mechanism that highly matches TEL devices

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218