TEL Tokyo Electron 1B80-002392-11接口板
1.产 品 资 料 介 绍：
中文资料：
产品名称：TEL Tokyo Electron 1B80-002392-11 接口板
类别：电子接口模块 / Interface Board
制造商：Tokyo Electron Limited（TEL）
一、产品功能概述
TEL 的接口板通常用于半导体制造设备中，作为信号交换、通信桥接与系统协同控制的核心模块，主要实现以下功能：
提供控制单元与执行机构之间的电气连接
转换和中继来自传感器、执行器或外部子系统的信号
对信号进行格式转换、缓冲处理或逻辑判断
作为系统互锁、错误检测与联动控制的一部分
二、典型应用领域
1. 薄膜沉积设备（CVD / ALD / PVD）
用于气体流量控制单元（MFC）、加热平台、阀门执行机构与主控系统之间的数据与控制信号传输。
2. 等离子体刻蚀机（Etcher）
连接RF电源、真空腔体控制器、温控器与主控模块；
实现过程监控信号的收发与控制。
3. 晶圆清洗设备（Wafer Cleaners）
连接喷淋装置、液体阀组、电动执行元件等；
实现多通道传感与控制。
4. 晶圆传输系统（Transfer Module）
协调机械臂、位置传感器、电机驱动器与控制系统的通信；
保障晶圆在真空环境中高精度传输。
5. 光刻与曝光设备（Lithography）
管理曝光头、电动调焦平台、UV源与控制系统间的信号传输；
提供稳定的接口逻辑。
英文资料：
Product Name: TEL Tokyo Electron 1B80-002392-11 Interface Board
Category: Electronic Interface Module/Interface Board
Manufacturer: Tokyo Electron Limited (TEL)
1、 Product Function Overview
TEL interface boards are commonly used in semiconductor manufacturing equipment as core modules for signal exchange, communication bridging, and system collaborative control. They mainly achieve the following functions:
Provide electrical connections between the control unit and the actuator
Convert and relay signals from sensors, actuators, or external subsystems
Format conversion, buffering, or logical judgment of signals
As part of system interlocking, error detection, and linkage control
2、 Typical application areas
1. Thin film deposition equipment (CVD/ALD/PVD)
Used for data and control signal transmission between gas flow control units (MFCs), heating platforms, valve actuators, and main control systems.
2. Plasma Etcher
Connect RF power supply, vacuum chamber controller, temperature controller and main control module;
Implement the transmission, reception, and control of process monitoring signals.
3. Wafer Cleaners
Connect spray devices, liquid valve groups, electric actuators, etc;
Realize multi-channel sensing and control.
4. Wafer Transfer Module
Coordinate the communication between the robotic arm, position sensor, motor driver, and control system;
Ensure high-precision transmission of wafers in a vacuum environment.
5. Lithography and Exposure Equipment
Manage the signal transmission between the exposure head, electric focusing platform, UV source, and control system;
Provide stable interface logic.
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
