TEL Tokyo Electron 2981-600409-11继电器板

TEL Tokyo Electron 2981-600409-11继电器板

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 2981-600409-11 继电器板
类型：继电器控制模块 / Relay Control PCB
制造商：Tokyo Electron Ltd.（TEL）

一、产品功能概述

该继电器板用于 TEL 半导体设备中，是控制系统中实现电气信号切换、功率驱动以及设备状态联锁的重要中间控制模块，主要负责以下功能：

• 控制大电流负载，如电磁阀、加热器、电机、泵等

• 作为数字信号（来自主控或 PLC）与执行机构之间的电气接口

• 实现通断控制、状态切换、安全联锁、顺序逻辑执行等

• 支持远程逻辑驱动和局部机械继电保护功能

二、典型应用领域

1. 气体输送与阀门控制系统

• 控制气体通断、电磁阀组开闭（如 N2、Ar、SiH₄ 等）

• 与 MFC 模块联动，按工艺流程启闭

2. 真空泵与真空腔体

• 控制真空泵、电磁放气阀、真空阀门执行单元

• 结合传感器实现真空状态自动切换控制

3. 温控与加热系统

• 控制加热电源、电热片、热板或冷却风扇等

• 提供带延时保护的继电器通断逻辑

4. 晶圆搬运与传送

• 控制 Load Port、机械臂动作电源回路

• 用于启动/停止定位系统、平台升降等

英文资料：

TEL Tokyo Electron 2981-600409-11 Relay Board

Type: Relay Control Module/Relay Control PCB

Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

This relay board is used in TEL semiconductor equipment and is an important intermediate control module in the control system to achieve electrical signal switching, power drive, and equipment status interlocking. It is mainly responsible for the following functions:

Control high current loads such as solenoid valves, heaters, motors, pumps, etc

As an electrical interface between digital signals (from the main control or PLC) and actuators

Implement on-off control, state switching, safety interlocking, sequential logic execution, etc

Support remote logic drive and local mechanical relay protection functions

2、 Typical application areas

1. Gas delivery and valve control system

Control gas on/off, solenoid valve group on/off (such as N2, Ar, SiH ₄, etc.)

Linkage with MFC module, open and close according to the process flow

2. Vacuum pump and vacuum chamber

Control the vacuum pump, electromagnetic vent valve, and vacuum valve execution unit

Combining sensors to achieve automatic switching control of vacuum state

3. Temperature control and heating system

Control heating power supply, electric heating element, hot plate or cooling fan, etc

Provide relay on-off logic with delay protection

4. Wafer handling and transportation

Control the load port and the power supply circuit for the action of the robotic arm

Used for starting/stopping positioning systems, platform lifting, etc

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218