TEL Tokyo Electron 3M81-029643-12电机分配板

TEL Tokyo Electron  3M81-029643-12电机分配板

1.产 品 资 料 介 绍：

中文资料：

3M81-029643-12 电机分配板
制造商：Tokyo Electron Ltd.（TEL）
部件类型：电机分配控制板（Motor Distribution PCB）

一、功能概述

3M81-029643-12 电机分配板是用于 TEL 半导体制造设备中的电动执行机构集中控制模块，主要作用是：

• 将来自主控制器或驱动器的控制信号分配给多个电机

• 管理多个电机的电源供应、信号中继和运行状态反馈

• 实现多个运动控制通道的模块化接线与分组控制

• 保障不同电机之间的运行互锁、同步或独立控制

二、典型应用领域

该分配板广泛用于 TEL 设备中涉及晶圆搬运、定位、升降等动作的系统模块，包括但不限于：

1. 晶圆搬运系统（Transfer Module）

• 控制机器人臂的旋转、伸缩、升降等多个电机

• 实现多轴协同运动与定位反馈

2. Load Port / EFEM（前端晶圆装载）

• 管理载台升降、电动门开闭、机械限位复位等电机动作

• 支持传感器与电机之间的安全联锁信号

3. 真空腔体辅助装置

• 控制闸门开关电机、腔体托盘旋转电机等

• 与腔体真空传感器、门禁反馈机制协同

4. 化学处理/清洗/烘干系统

• 驱动液体切换阀、泵电机或喷淋头定位装置

• 精确控制流体通道及喷淋动作路径

英文资料：

3M81-029643-12 Motor Distribution Board

Manufacturer: Tokyo Electron Ltd. (TEL)

Component type: Motor Distribution PCB

1、 Function Overview

The 3M81-029643-12 motor distribution board is a centralized control module for electric actuators used in TEL semiconductor manufacturing equipment. Its main function is to:

Distribution of control signals from autonomous controllers or drivers to multiple motors in the future

Manage power supply, signal relay, and operational status feedback for multiple motors

Implement modular wiring and group control for multiple motion control channels

Ensure interlocking, synchronization, or independent control of the operation between different motors

2、 Typical application areas

This distribution board is widely used in system modules involving wafer handling, positioning, lifting, and other actions in TEL equipment, including but not limited to:

1. Wafer Transfer Module

Control multiple motors for the rotation, extension, and lifting of the robot arm

Realize multi axis collaborative motion and positioning feedback

2. Load Port/EFEM (Front End Wafer Loading)

Manage motor actions such as platform lifting, electric door opening and closing, mechanical limit reset, etc

Support safety interlock signals between sensors and motors

3. Vacuum chamber auxiliary device

Control gate switch motor, cavity tray rotation motor, etc

Collaborate with cavity vacuum sensors and access control feedback mechanisms

4. Chemical treatment/cleaning/drying system

Drive liquid switching valve, pump motor or spray head positioning device

Accurately control fluid channels and spray action paths

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218