TEL Tokyo Electron 3D80-000158-V3接口盒

TEL Tokyo Electron 3D80-000158-V3接口盒

1.产 品 资 料 介 绍：

中文资料：

3D80-000158-V3 接口盒
制造商：Tokyo Electron Ltd.（TEL）
类别：接口盒 / Interface Box / Signal Junction Box

一、功能概述

3D80-000158-V3 接口盒是 TEL 半导体设备中用于信号集中与分发的模块，其主要作用包括：

• 作为信号中转枢纽，连接主控板与多个外围设备

• 汇集并路由各类信号线，如数字/模拟输入输出、通信线缆、电源线等

• 实现系统内部模块间的电气连接隔离与保护

• 提高布线整洁性与模块化管理效率

二、典型应用领域

该接口盒主要用于 TEL 设备中的以下场景：

1. 晶圆搬运系统（Transfer Module / EFEM）

• 汇总机械手、升降平台、门禁传感器、编码器的信号

• 接入伺服驱动、电源、位置传感器等装置

2. 气体控制与阀门模块

• 连接 MFC、电磁阀、压力传感器，提供标准信号接口

• 支持集中接线、方便检修与更换

3. Loadlock 或真空腔体控制区域

• 管理闸门驱动器、真空计、电磁阀等外围设备信号

• 实现多种信号的电气隔离与安全接线

4. 工具通讯/控制箱辅助单元

• 提供与上位控制系统、其他 I/O 模块的通信接口

• 作为分布式控制系统的一部分，实现设备模块之间连接

英文资料：

3D80-000158-V3 interface box

Manufacturer: Tokyo Electron Ltd. (TEL)

Category: Interface Box/Signal Junction Box

1、 Function Overview

The 3D80-000158-V3 interface box is a module used for signal concentration and distribution in TEL semiconductor equipment. Its main functions include:

As a signal relay hub, it connects the main control board with multiple peripheral devices

Collect and route various signal lines, such as digital/analog input/output, communication cables, power lines, etc

Implement electrical connection isolation and protection between internal modules of the system

Improve wiring cleanliness and modular management efficiency

2、 Typical application areas

This interface box is mainly used in the following scenarios in TEL devices:

1. Wafer Transfer Module/EFEM

Summarize signals from robotic arms, lifting platforms, access control sensors, and encoders

Connect servo drive, power supply, position sensor and other devices

2. Gas control and valve module

Connect MFC, solenoid valve, pressure sensor, and provide standard signal interface

Support centralized wiring, convenient maintenance and replacement

3. Loadlock or vacuum chamber control area

Manage peripheral device signals such as gate drivers, vacuum gauges, solenoid valves, etc

Realize electrical isolation and safe wiring of multiple signals

4. Tool communication/control box auxiliary unit

Provide communication interfaces with the upper control system and other I/O modules

As part of a distributed control system, connect device modules to each other

2.产      品      展      示      

3.其他产品

 067-02121-0005 中央控制器模块

PROSOFT MVI56-MBP 可编程逻辑控制系统

 61-0669-02接口板模块

4.其他英文产品

Teknic SST-1500-XCX Digital Servo Drive

Metrix 5533-104 Sensor

ABB SB822 3BSE018172R1 rechargeable  

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218