TEL Tokyo Electron BX81-070082-12接口模块

TEL Tokyo Electron BX81-070082-12接口模块

1.产 品 资 料 介 绍：

中文资料：

BX81-070082-12 接口模块
制造商：Tokyo Electron Ltd.（TEL）
类别：接口模块（Interface Module）

一、功能概述

BX81-070082-12 接口模块用于半导体设备中，是系统控制单元与外围执行或传感设备之间的信号桥接组件，其主要功能包括：

• 实现主控板与传感器、执行器、驱动器等之间的信号交互

• 提供数字输入/输出、模拟信号、通信信号的集中管理

• 对信号进行适配、电平转换或缓冲，提升系统抗干扰性能

• 支持联锁控制与模块化信号接入，增强系统稳定性与可维护性

二、典型应用领域

BX81-070082-12 主要用于 TEL 设备中需要 多点信号采集与控制输出 的系统部分，常见应用包括：

1. 晶圆搬运系统（Transfer Module）

• 连接电机、光电开关、限位传感器

• 实现多轴动作协调控制

2. 气体控制/供应模块

• 接入 MFC（质量流量控制器）、压力开关、电磁阀等元件

• 实现工艺气体的精密控制和联锁安全逻辑

3. Loadlock 模块或腔体控制单元

• 管理真空阀、门控执行器、压力传感器等设备的信号接入

• 用于设备自动运行流程中的状态判断与动作触发

4. 清洗、烘干、液体处理区域

• 接入化学液流路、电加热装置、泵驱动器

• 实现温度、流量、液位等信号控制与反馈

英文资料：

BX81-070082-12 Interface Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Category: Interface Module

1、 Function Overview

The BX81-070082-12 interface module is used in semiconductor equipment as a signal bridging component between the system control unit and peripheral execution or sensing devices. Its main functions include:

Realize signal interaction between the main control board and sensors, actuators, drivers, etc

Provide centralized management of digital input/output, analog signals, and communication signals

Adapt, level convert or buffer signals to enhance system anti-interference performance

Support interlocking control and modular signal access to enhance system stability and maintainability

2、 Typical application areas

BX81-070082-12 is mainly used in the system part of TEL equipment that requires multi-point signal acquisition and control output. Common applications include:

1. Wafer Transfer Module

Connect the motor, photoelectric switch, and limit sensor

Realize multi axis action coordination control

2. Gas control/supply module

Connect components such as MFC (Mass Flow Controller), pressure switch, solenoid valve, etc

Realize precise control and interlocking safety logic of process gases

3. Loadlock module or cavity control unit

Manage signal access for devices such as vacuum valves, door control actuators, pressure sensors, etc

Used for status judgment and action triggering in the automatic operation process of equipment

4. Cleaning, drying, and liquid processing areas

Connect chemical liquid flow path, electric heating device, pump driver

Realize signal control and feedback of temperature, flow rate, liquid level, etc

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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