TEL Tokyo Electron 2L08-050053-11电路板
1.产 品 资 料 介 绍:
中文资料:
一、功能概述
该电路板为 TEL 半导体设备中使用的标准控制类 PCB,主要起到以下作用:
实现设备中各类信号(数字、模拟、控制信号)的接收与分配
用作子系统之间的接口板或控制执行单元的部分组成
可能负责传感器数据采集、电源控制、I/O 扩展、继电器驱动等任务
有时还承担信号缓冲、电平转换、隔离与保护等功能
二、典型应用领域
根据 TEL 命名规则与编号范围(2L08 开头通常表示与传感器/控制区域相关的功能),该电路板可能用于以下子系统模块:
1. 传感器信号采集系统
采集压力、温度、位置、液位等模拟或开关信号
对接流量计、光电传感器、编码器等装置
2. 气体/液体流路控制系统
控制 MFC、电磁阀、真空阀门的开闭逻辑
监测气液流量状态,触发联锁保护机制
3. Loadlock 控制区域
协助控制门体动作、真空状态检测、气体切换等操作
实现精密子系统的运行状态判断和反馈
4. 电源或继电器控制模块中的子板
驱动小型负载、电磁继电器或控制信号输出通道
提供板载保护与滤波功能,保障控制信号稳定性
英文资料:
1、 Function Overview
This circuit board is a standard control PCB used in TEL semiconductor equipment, mainly serving the following functions:
Realize the reception and distribution of various signals (digital, analog, control signals) in the device
A component used as an interface board or control execution unit between subsystems
May be responsible for tasks such as sensor data acquisition, power control, I/O expansion, relay driving, etc
Sometimes it also undertakes functions such as signal buffering, level conversion, isolation, and protection
2、 Typical application areas
According to the TEL naming convention and numbering range (2L08 usually indicates functions related to sensors/control areas), this circuit board may be used for the following subsystem modules:
1. Sensor signal acquisition system
Collect analog or switch signals such as pressure, temperature, position, liquid level, etc
Docking flow meters, photoelectric sensors, encoders and other devices
2. Gas/liquid flow control system
Control the opening and closing logic of MFC, solenoid valve, and vacuum valve
Monitor the gas-liquid flow status and trigger the interlock protection mechanism
3. Loadlock control area
Assist in controlling door movement, vacuum state detection, gas switching and other operations
Realize the operation status judgment and feedback of precision subsystems
4. Sub board in power or relay control module
Drive small loads, electromagnetic relays, or control signal output channels
Provide onboard protection and filtering functions to ensure the stability of control signals
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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