TEL Tokyo Electron CS014-000733-1温度控制器
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：CS014-000733-1
产品名称：温度控制器（Temperature Controller）
制造商：Tokyo Electron（TEL）
产品类型：专用工业温度控制器
应用领域：用于半导体制造设备中的温度监测与调节
二、主要功能
温度测量：采集加热器、加热板、炉膛等关键部位的温度信号
温度调节：根据设定参数控制加热元件功率，实现精准温度控制
报警功能：当温度超出设定范围时触发报警，保障设备安全运行
多通道支持：可能支持多个温度传感器输入，实现多点温控
通信接口：与设备主控系统连接，实时传输温度数据和状态
三、典型应用领域
光刻机前后处理设备（如涂胶显影系统）
薄膜沉积设备中的加热控制（CVD、PVD系统）
蚀刻设备温度管理
晶圆加热/烘烤模块
四、技术特点
高精度温度采集和控制，保证工艺稳定性
工业级设计，适应洁净室及复杂工艺环境
兼容多种温度传感器类型（热电偶、RTD等）
稳定可靠的输出控制，支持PID等先进控制算法
英文资料：
1、 Basic Information
Product model: CS114-000733-1
Product Name: Temperature Controller
Manufacturer: Tokyo Electron (TEL)
Product Type: Specialized Industrial Temperature Controller
Application field: Used for temperature monitoring and regulation in semiconductor manufacturing equipment
2、 Main functions
Temperature measurement: Collect temperature signals from key parts such as heaters, heating plates, and furnaces
Temperature regulation: Control the power of heating elements according to set parameters to achieve precise temperature control
Alarm function: When the temperature exceeds the set range, an alarm is triggered to ensure the safe operation of the equipment
Multi channel support: may support multiple temperature sensor inputs to achieve multi-point temperature control
Communication interface: connected to the main control system of the device, real-time transmission of temperature data and status
3、 Typical application areas
Pre - and post-processing equipment for lithography machines (such as coating and developing systems)
Heating control in thin film deposition equipment (CVD, PVD systems)
Temperature management of etching equipment
Wafer heating/baking module
4、 Technical features
High precision temperature acquisition and control to ensure process stability
Industrial grade design, suitable for clean rooms and complex process environments
Compatible with multiple types of temperature sensors (thermocouples, RTDs, etc.)
Stable and reliable output control, supporting advanced control algorithms such as PID
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
