TEL Tokyo Electron 3281-000146-12驱动器模块
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：3281-000146-12
产品名称：驱动器模块（Driver Module）
制造商：Tokyo Electron（TEL）
模块类别：执行机构驱动模块
版本号：12 版（特定修订版本）
二、主要功能
电机驱动：为步进电机、伺服电机或其他执行机构提供控制信号与驱动力
执行动作控制：根据主控指令控制设备机械动作的启动、停止、转速及位置
信号处理：处理反馈信号，实现闭环控制
保护功能：过流、过压、过热等保护，保障模块和设备安全
三、典型应用领域
半导体制造设备中机械臂、传送机构的驱动
涂胶显影设备中的旋转平台驱动
蚀刻设备内气体流量阀门或真空泵驱动
搬运系统、升降台、定位装置等的执行单元
四、模块特点
高集成度设计，适应复杂工艺设备要求
支持多种控制协议，兼容TEL设备控制架构
工业级稳定性，适应洁净室环境
版本“-12”表示硬件或固件升级，确保最佳性能
英文资料：
1、 Basic Information
Product model: 3281-000146-12
Product Name: Driver Module
Manufacturer: Tokyo Electron (TEL)
Module category: actuator driver module
Version number: 12th edition (specific revised version)
2、 Main functions
Motor drive: provides control signals and driving force for stepper motors, servo motors, or other actuators
Execution action control: Control the start, stop, speed, and position of the mechanical action of the equipment according to the main control instructions
Signal processing: Processing feedback signals to achieve closed-loop control
Protection function: overcurrent, overvoltage, overheating and other protections to ensure the safety of modules and equipment
3、 Typical application areas
Drive of robotic arms and conveyor mechanisms in semiconductor manufacturing equipment
Rotating platform drive in coating and developing equipment
Gas flow valve or vacuum pump drive inside etching equipment
Execution units for handling systems, lifting platforms, positioning devices, etc
4、 Module features
Highly integrated design, suitable for complex process equipment requirements
Supports multiple control protocols and is compatible with TEL device control architecture
Industrial grade stability, suitable for clean room environment
Version "-12" indicates hardware or firmware upgrade to ensure optimal performance
2.产 品 展 示
3.其他产品
4.其他英文产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
