TEL Tokyo Electron 3D81-000020-V3电源 PCB 卡
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：3D81-000020-V3
产品名称：电源 PCB 卡（Power Supply PCB Board）
制造商：Tokyo Electron Limited（TEL）
模块类型：电源分配与管理用印刷电路板
版本号：V3（代表第三版，硬件已优化或针对特定系统升级）
二、主要功能
| 功能类别 | 描述 |
|---|---|
| 电源分配 | 接收外部或上级模块电源，将电力分配至多个子模块或子系统使用。 |
| 电压转换 | 内置 DC-DC 或稳压芯片，将输入电压转换为所需工作电压（如 24V 转 5V/12V）。 |
| 过载/短路保护 | 提供电气保护机制，如过电压、过流保护、防反接设计。 |
| 状态监控 | 可能带有 LED 状态指示、电压监测等辅助功能。 |
| 信号接口 | 提供与控制板的电源通信与状态反馈接口。 |
三、典型应用场景
该电源 PCB 卡广泛应用于以下 TEL 设备模块中：
光刻工艺支持系统（如 Clean Track ACT 系列）
为控制器、传感器、加热模块、马达等提供稳定电源
CVD / Etch 系统（薄膜沉积或蚀刻）
用于关键腔体加热元件、真空控制器、气体流量模块的电源管理
搬运与真空腔体控制系统
提供升降装置、机械臂控制器、传感反馈电路所需电源
英文资料：
1、 Basic Information
Product model: 3D81-000020-V3
Product Name: Power Supply PCB Board
Manufacturer: Tokyo Electron Limited (TEL)
Module type: Printed circuit board for power distribution and management
Version number: V3 (representing the third version, hardware optimized or upgraded for specific systems)
2、 Main functions
Functional category description
Power distribution receives external or higher-level module power and distributes power to multiple sub modules or subsystems for use.
The voltage conversion is equipped with a built-in DC-DC or voltage regulator chip, which converts the input voltage into the required operating voltage (such as 24V to 5V/12V).
Overload/short circuit protection provides electrical protection mechanisms such as overvoltage, overcurrent protection, and anti reverse design.
Status monitoring may have auxiliary functions such as LED status indication and voltage monitoring.
The signal interface provides power communication and status feedback interface with the control board.
3、 Typical application scenarios
This power PCB card is widely used in the following TEL device modules:
Lithography process support system (such as Clean Track ACT series)
Provide stable power supply for controllers, sensors, heating modules, motors, etc
CVD/Etch system (thin film deposition or etching)
Power management for key chamber heating elements, vacuum controllers, and gas flow modules
Handling and Vacuum Chamber Control System
Provide power supply for lifting devices, robotic arm controllers, and sensing feedback circuits
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
