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TEL Tokyo Electron 1B80-002789-11 光纤接口板

发布时间:2025-06-26人气:
  • TEL Tokyo Electron 1B80-002789-11 光纤接口板
  • TEL Tokyo Electron 1B80-002789-11 光纤接口板

TEL Tokyo Electron  1B80-002789-11 光纤接口板

1.产 品 资 料 介 绍:

中文资料:

一、基本信息

  • 产品型号:1B80-002789-11

  • 产品名称:光纤接口板(Fiber Optic Interface Board)

  • 制造商:Tokyo Electron Limited(TEL,日本东京电子)

  • 硬件版本号:-11(表示该型号的第11版修订)


二、主要功能

该光纤接口板用于在 TEL 半导体设备中实现高速、远距离、抗干扰的数据传输,通常负责设备主控系统与远程子系统之间的信号通信桥接。

功能类别描述
光电转换功能将电信号转换为光信号(发送端),或将光信号转换为电信号(接收端)
高速数据通信支持高速串行通信,常用于多板之间或与外部控制单元间数据交互
远距离传输使用光纤作为介质,传输距离远,且无电磁干扰
隔离与防护光通信天然具备电气隔离能力,保障主控系统安全
多通道接口支持可支持单通道或多通道光纤收发器连接,用于并行或冗余通信

三、典型应用场景

此模块广泛应用于 TEL 设备中要求高速、长距离或高抗干扰能力的控制系统,常见于:

  • ACT 系列光刻辅助处理设备

    • 用于 EFEM(前端模块)、主控系统与处理腔体间通信桥接

  • Tactras / Trias 系列蚀刻与沉积设备

    • 实现气路控制单元、电源模块、RF 控制器等远端系统连接

  • Transfer、Load Port、Robot 控制系统

    • 控制信号或状态数据通过光纤远距离回传至主控制器

英文资料:

1、 Basic Information

Product model: 1B80-002789-11


Product Name: Fiber Optic Interface Board


Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)


Hardware version number: -11 (indicating the 11th revision of this model)


2、 Main functions

This fiber optic interface board is used to achieve high-speed, long-distance, and anti-interference data transmission in TEL semiconductor equipment, usually responsible for bridging signal communication between the equipment main control system and remote subsystems.


Functional category description

The photoelectric conversion function converts electrical signals into optical signals (transmitting end), or converts optical signals into electrical signals (receiving end)

High speed data communication supports high-speed serial communication and is commonly used for data exchange between multiple boards or with external control units

Long distance transmission uses optical fiber as a medium, with a long transmission distance and no electromagnetic interference

Isolation and protection optical communication naturally has electrical isolation capabilities to ensure the safety of the main control system

Multi channel interface support can support single channel or multi-channel fiber optic transceiver connections for parallel or redundant communication


3、 Typical application scenarios

This module is widely used in control systems in TEL devices that require high speed, long distance, or high anti-interference capabilities. It is commonly used in:


ACT series lithography auxiliary processing equipment


Used for communication bridging between EFEM (front-end module), main control system, and processing chamber


Tactras/Trias series etching and deposition equipment


Realize remote system connections such as gas path control unit, power module, RF controller, etc


Transfer, Load Port, Robot Control System


Control signals or status data are transmitted back to the main controller via optical fiber over a long distance

2.产      品      展      示      

1b80-002789-11_pcb_di80do96_dn_board_tokyo_electron_tel_2.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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