TEL Tokyo Electron 2981-600534-1印刷电路板
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2981-600534-1 印刷电路板是一款应用于半导体制造设备中的专用控制板卡，主要作用是实现设备内部各子系统的信号采集、控制执行和通信管理。该电路板主要应用于以下几个领域：
一、典型应用设备类型
干法刻蚀设备（Etcher）
薄膜沉积设备（CVD、ALD等）
光刻胶涂布/显影设备（Track System）
晶圆清洗设备（Wafer Cleaner）
二、功能定位
控制模块：驱动执行部件如电磁阀、马达、温控单元等
信号处理：采集传感器信号，处理温度、压力、流量等数据
通信接口：与上位控制系统（如主控板、工控机）进行高速通信
故障诊断：记录设备运行数据并支持故障检测与报警反馈
三、主要应用场景
晶圆制程工段中的多腔室协调控制
制程环境监控与自动化调节
化学品供给系统的实时控制
封装前高精度工艺参数控制
四、应用优势
提高系统控制响应速度与数据传输稳定性
支持多任务并行处理与模块化扩展
适用于洁净室内高标准工业控制环境
英文资料：
TEL Tokyo Electron 2981-600534-1 printed circuit board is a specialized control board used in semiconductor manufacturing equipment, mainly responsible for signal acquisition, control execution, and communication management of various subsystems within the equipment. This circuit board is mainly used in the following fields:
1、 Typical application device types
Dry etching equipment (Etcher)
Thin film deposition equipment (CVD, ALD, etc.)
Photoresist coating/developing equipment (Track System)
Wafer Cleaner
2、 Functional positioning
Control module: drives execution components such as solenoid valves, motors, temperature control units, etc
Signal processing: Collecting sensor signals, processing temperature, pressure, flow rate and other data
Communication interface: high-speed communication with the upper control system (such as the main control board and industrial computer)
Fault diagnosis: Record equipment operation data and support fault detection and alarm feedback
3、 Main application scenarios
Multi chamber coordinated control in wafer process section
Process environment monitoring and automation adjustment
Real time control of chemical supply system
High precision process parameter control before packaging
4、 Application advantages
Improve system control response speed and data transmission stability
Support multitasking parallel processing and modular expansion
Suitable for high standard industrial control environments in clean rooms
2.产 品 展 示
3.其他产品
Siemens 6ES7307-1EA01-0AA0 电源模块
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
