TEL Tokyo Electron 2910-325648-12控制单元

TEL Tokyo Electron  2910-325648-12控制单元

1.产 品 资 料 介 绍：

中文资料：

TEL Tokyo Electron 2910-325648-12 控制单元（Control Unit） 是一款专用于TEL半导体制造设备中的关键系统控制模块，主要负责协调设备内部的多个功能子系统，执行核心控制逻辑，确保工艺流程的准确性、安全性与稳定性。

一、基本信息

• 产品名称：控制单元 / Control Unit

• 产品型号：2910-325648-12

• 制造商：Tokyo Electron Ltd.（TEL）

• 所属类别：系统级控制器或分区控制模块

• 部署位置：安装于设备电控机柜或功能模块控制区域内

二、核心功能

1. 设备状态管理

   • 管理设备的开机/就绪/运行/报警/待机等状态。

   • 提供设备运行过程的信号协调与同步控制。

2. 多子系统联动控制

   • 协调如气体控制模块（GCU）、真空系统、电源管理、加热/冷却系统等子系统的运行逻辑。

   • 实现复杂工艺的顺序控制与状态反馈。

3. 通信与数据处理

   • 与主控系统、HMI操作界面、远程监控系统通信；

   • 接收上位机控制命令，上传运行状态与报警信息。

4. 故障检测与安全联锁

   • 实时监测运行参数，如传感器状态、电源状态、阀门反馈等；

   • 在异常情况下执行急停、报警、联锁保护等安全机制。

英文资料：

TEL Tokyo Electron 2910-325648-12 Control Unit is a critical system control module specifically designed for TEL semiconductor manufacturing equipment. It is mainly responsible for coordinating multiple functional subsystems within the equipment, executing core control logic, and ensuring the accuracy, safety, and stability of the process flow.

1、 Basic Information

Product Name: Control Unit

Product model: 2910-325648-12

Manufacturer: Tokyo Electron Ltd. (TEL)

Category: System level controller or partition control module

Deployment location: Installed in the electrical control cabinet or functional module control area of the equipment

2、 Core functions

Equipment status management

Manage the boot/ready/running/alarm/standby status of devices.

Provide signal coordination and synchronization control for the operation process of the equipment.

Multi subsystem linkage control

Coordinate the operational logic of subsystems such as gas control module (GCU), vacuum system, power management, heating/cooling system, etc.

Implement sequential control and state feedback for complex processes.

Communication and Data Processing

Communicate with the main control system, HMI interface, and remote monitoring system;

Receive control commands from the upper computer, upload operational status and alarm information.

Fault detection and safety interlocking

Real time monitoring of operating parameters, such as sensor status, power status, valve feedback, etc;

Implement safety mechanisms such as emergency stop, alarm, and interlock protection in abnormal situations.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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