TEL Tokyo Electron 3880-200047-24控制脉冲卡件
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3880-200047-24 控制脉冲卡件（Control Pulse Board） 是一款专用于控制系统中的高精度信号输出模块，主要应用于TEL半导体设备中，用于控制脉冲信号的生成、传输与分配，是设备执行控制动作的重要板件之一，常用于定时触发、驱动同步、信号整形等关键控制逻辑中。
一、基本信息
产品名称：控制脉冲卡件（Control Pulse Board）
产品型号：3880-200047-24
制造商：Tokyo Electron Ltd.（TEL）
功能类型：脉冲信号控制与输出模块
安装位置：主控电控机架或信号控制板框内
二、主要功能
脉冲信号输出控制
产生定制化的脉冲信号用于触发外部设备（如驱动器、阀门、电磁铁等）。
支持高频率、精准时序的控制要求。
信号分配与整形
将主控系统的控制命令转换为标准脉冲形式，分配至多个执行单元。
对输入信号进行整形、滤波，提升信号的抗干扰性。
设备动作同步
保证多个控制单元按设定时序动作，实现设备内部同步控制逻辑。
可用于步进动作、过程转换等工艺节点触发。
过程控制联锁接口
支持工艺过程的联锁逻辑，如达到某一条件后输出精确脉冲信号启动下一步骤。
三、典型应用场景
| 所属设备系统 | 典型应用作用 |
|---|---|
| Etcher（刻蚀设备） | 控制等离子发生器、RF电源等脉冲触发信号 |
| CVD/ALD（沉积设备） | 控制气阀开关时间、反应区进气节拍控制 |
| Track（涂胶显影设备） | 步进马达定点控制、加热平台脉冲触发加热 |
| Transfer模块 | 控制机械臂脉冲驱动信号、夹具开闭信号发送 |
英文资料：
TEL Tokyo Electron 3880-200047-24 Control Pulse Board is a high-precision signal output module specifically designed for control systems. It is mainly used in TEL semiconductor equipment to control the generation, transmission, and distribution of pulse signals. It is one of the important boards for executing control actions in equipment and is commonly used in key control logic such as timing triggering, drive synchronization, and signal shaping.
1、 Basic Information
Product Name: Control Pulse Board
Product model: 3880-200047-24
Manufacturer: Tokyo Electron Ltd. (TEL)
Function type: Pulse signal control and output module
Installation location: inside the main control rack or signal control board frame
2、 Main functions
Pulse signal output control
Generate customized pulse signals to trigger external devices such as drivers, valves, electromagnets, etc.
Support high-frequency and precise timing control requirements.
Signal allocation and shaping
Convert the control commands of the main control system into standard pulse form and allocate them to multiple execution units.
Shape and filter the input signal to enhance its anti-interference ability.
Equipment action synchronization
Ensure that multiple control units operate according to the set timing to achieve synchronous control logic within the device.
Can be used to trigger process nodes such as step actions and process transitions.
Process control interlock interface
Support the interlocking logic of the process, such as outputting precise pulse signals to start the next step after reaching a certain condition.
3、 Typical application scenarios
Typical application roles of the device system
Etcher (etching equipment) controls pulse triggering signals such as plasma generator and RF power supply
CVD/ALD (deposition equipment) control valve opening and closing time, reaction zone intake rhythm control
Track (adhesive developing equipment) stepper motor fixed-point control, heating platform pulse triggered heating
Transfer module controls the transmission of robotic arm pulse drive signals and fixture opening and closing signals
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
