TEL Tokyo Electron 1D86-025584-12自动化控制模块
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D86-025584-12 自动化控制模块（Automation Control Module） 是一款专用于TEL半导体设备的控制核心单元，负责自动执行设备工艺逻辑、运动控制、状态监测与安全联锁等功能，是保障制程精准、高效、安全运行的关键模块之一。
一、基本信息
产品名称：自动化控制模块（Automation Control Module）
产品型号：1D86-025584-12
制造商：Tokyo Electron Ltd.（TEL）
安装位置：控制柜或控制主板框架内，通常靠近主控处理器和I/O接口区域
适用系统：可能用于 TEL 的涂胶显影系统（Track）、刻蚀设备（Etcher）、CVD系统或搬运系统（Transfer Module）
二、主要功能
自动工艺逻辑控制
控制设备运行过程中的一系列动作序列，如加热、抽真空、进气、搬运等。
预设流程步骤可在程序中实现闭环控制。
运动控制与执行器管理
驱动机械臂、马达、气缸等执行单元，精确控制位置与节拍。
支持直流电机/步进电机控制脉冲信号输出。
设备状态监测与反馈
接收传感器输入（位置、压力、温度、门状态等），判断当前设备运行状态。
提供故障报警、联锁保护功能。
通信与系统集成
与上位机、主控板通信，实现工艺参数下发与状态上传。
支持多种工业通信协议（如 CAN、Modbus、RS-232/485、TEL专用协议等）。
英文资料：
TEL Tokyo Electron 1D86-025584-12 Automation Control Module is a control core unit dedicated to TEL semiconductor equipment, responsible for automatically executing equipment process logic, motion control, status monitoring, and safety interlocking functions. It is one of the key modules to ensure accurate, efficient, and safe operation of the process.
1、 Basic Information
Product Name: Automation Control Module
Product Model: 1D86-025584-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Installation location: inside the control cabinet or control motherboard frame, usually near the main control processor and I/O interface area
Applicable systems: May be used for TEL coating and development systems (Track), etching equipment (Etcher), CVD systems, or transfer modules
2、 Main functions
Automatic process logic control
A series of action sequences during the operation of control equipment, such as heating, vacuuming, air intake, and handling.
The preset process steps can be implemented in the program for closed-loop control.
Motion control and actuator management
Drive robotic arms, motors, cylinders, and other execution units to precisely control position and rhythm.
Support DC motor/stepper motor control pulse signal output.
Equipment status monitoring and feedback
Receive sensor inputs (position, pressure, temperature, door status, etc.) to determine the current operating status of the equipment.
Provide fault alarm and interlock protection functions.
Communication and System Integration
Communicate with the upper computer and main control board to issue process parameters and upload status.
Supports multiple industrial communication protocols, such as CAN, Modbus, RS-232/485, TEL specific protocols, etc.
2.产 品 展 示
3.其他产品
4.其他英文产品
RADISYS 061-05927-0031 adapter module
| PMB33C-20214-01 | 07PS63R2 | PFCL201 20.0KN |
| PMB33C-20214-00 | 07AA61R1 | 1SAP250100R0001 |
| PMB33C-20201-03 | IMASI02 | N32HLLK-LNK-NS-01 |
| PMB33C-20201-02 | 07AA60R1 | PFRL101A 0.5KN 3BSE023314R0003 |
| PMB33C-20201-01 | AMAT 0100-09118 | 5730030-UP DSAO 120 |
| PMB33C-20201-00 | IPCHS01 | PFTL101AER 0.5KN 3BSE023010R1 |
| PMB33C-20200-03 | 07PT40 | 57120001-LK DSTY 110 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
