TEL Tokyo Electron 3T81-000003-1电路板
1.产 品 资 料 介 绍:
中文资料:
一、基本信息
产品型号:3T81-000003-1
产品名称:电路板(Circuit Board)
制造商:Tokyo Electron Ltd.(东京电子)
产品类别:控制/接口类印刷电路板(PCB)
适用设备:应用于 TEL 半导体制造设备(如蚀刻、CVD、清洗等设备系列)
二、功能定位
设备控制与信号处理
用作设备子系统中的控制核心板或接口中继板,负责接收、传输、处理数字或模拟信号。
模块化系统集成部件
起到连接主控系统与执行模块之间的桥梁作用,承载控制逻辑或数据分发任务。
数据通信与输入/输出控制
可能承担 I/O 控制、电平转换、传感器/执行器信号管理等功能。
三、应用领域
半导体设备控制系统内部
广泛用于 Tokyo Electron 的制程设备中,如:
蚀刻系统(Etch)
化学气相沉积系统(CVD)
干法清洗系统(Dry Cleaner)
输送/搬送控制系统(Transfer/Handler)
设备子系统之间的信号接口层
安装于设备主机或分体模块中,用于整合和路由关键控制信号。
英文资料:
1、 Basic Information
Product model: 3T81-000003-1
Product Name: Circuit Board
Manufacturer: Tokyo Electron Ltd
Product Category: Control/Interface Printed Circuit Board (PCB)
Applicable equipment: Used in TEL semiconductor manufacturing equipment (such as etching, CVD, cleaning and other equipment series)
2、 Functional positioning
Equipment Control and Signal Processing
Used as a control core board or interface relay board in device subsystems, responsible for receiving, transmitting, and processing digital or analog signals.
Modular system integration components
Plays a bridging role between the main control system and the execution module, carrying control logic or data distribution tasks.
Data Communication and Input/Output Control
May undertake functions such as I/O control, level conversion, sensor/actuator signal management, etc.
3、 Application Fields
Internal control system of semiconductor equipment
Widely used in the process equipment of Tokyo Electron, such as:
Etch etching system
Chemical Vapor Deposition System (CVD)
Dry Cleaner system
Transfer/Handler Control System
Signal interface layer between device subsystems
Installed in the device host or split module, used for integrating and routing critical control signals.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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