TEL Tokyo Electron E244-000053-11印刷电路板

TEL Tokyo Electron  E244-000053-11印刷电路板

1.产 品 资 料 介 绍：

中文资料：

一、基本信息

• 产品型号：E244-000053-11

• 产品名称：印刷电路板（PCB）

• 制造商：Tokyo Electron Ltd.（东京电子）

• 所属系统：用于 TEL 半导体制造设备中的控制与信号子系统

• 典型设备系列：可能应用于 Etch（蚀刻）设备、CVD（化学气相沉积）、Photoresist Stripper、真空处理机台等

二、功能定位

1. 控制信号处理

   • 承担来自主控系统的信号接收、转发、隔离或初步处理任务。

2. 数据通信接口

   • 作为各控制子模块（如传感器、执行器、阀控单元）与主机之间的通信桥梁。

3. 信号调节与分配

   • 对电平、电压、脉冲信号等进行调理，分配至下游组件或上传至主控制板。

4. 辅助功能集成

   • 可能包含继电控制、指示电路、诊断反馈等附属功能。

三、应用领域

• 半导体工艺设备控制系统

  • 在如 TEL Telius、Unity、Trias、Alpha 系列设备中，提供信号管理与板间连接支持。

• 温控/气压/化学流量子系统

  • 用于监控温度传感器、流量控制、气阀驱动、真空控制等模块。

• 干法蚀刻或沉积设备的子逻辑控制单元

  • 与阀组、电磁驱动器、真空泵监控等部件配套运行。

英文资料：

1、 Basic Information

Product Model: E244-000053-11

Product Name: Printed Circuit Board (PCB)

Manufacturer: Tokyo Electron Ltd

System: Used for the control and signal subsystem in TEL semiconductor manufacturing equipment

Typical equipment series: may be applied to Etch (etching) equipment, CVD (chemical vapor deposition) Photoresist Stripper、 Vacuum processing machines, etc

2、 Functional positioning

Control signal processing

Undertake signal reception, forwarding, isolation, or preliminary processing tasks from the main control system.

data communication interface

As a communication bridge between various control sub modules (such as sensors, actuators, valve control units) and the host.

Signal conditioning and distribution

Adjust levels, voltages, pulse signals, etc., and distribute them to downstream components or upload them to the main control board.

Integration of auxiliary functions

It may include auxiliary functions such as relay control, indication circuit, diagnostic feedback, etc.

3、 Application Fields

Semiconductor process equipment control system

Provide signal management and inter board connectivity support in devices such as TEL Telius, Unity, Trias, and Alpha series.

Temperature control/air pressure/chemical flow subsystem

Used for monitoring temperature sensors, flow control, valve drive, vacuum control and other modules.

Sub logic control unit of dry etching or deposition equipment

Operates in conjunction with valve groups, electromagnetic drivers, vacuum pump monitoring, and other components.

2.产      品      展      示      

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ASEA DSCA121 Robot Control Board

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218