TEL Tokyo Electron 3D81-050026-V1数字输入模块
1.产 品 资 料 介 绍：
中文资料：
产品名称：3D81-050026-V1 数字输入模块
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：数字输入模块（Digital Input Module）
一、产品概述
3D81-050026-V1 是 Tokyo Electron 半导体设备中用于采集数字信号（开关量信号）的专用输入模块。该模块用于从传感器、按钮、限位开关等外部设备接收开/关状态，并将其转换为可供控制系统处理的逻辑信号。
二、核心功能
数字信号采集
实时接收多个通道的二进制（开/关）输入信号，供主控系统做出逻辑判断。
信号隔离保护
输入通道通常具有光耦或电隔离设计，防止电压干扰或信号反灌。
状态反馈显示
可带状态指示灯，便于现场查看输入信号状态。
高速响应
适用于对响应时间有要求的控制任务，如安全互锁、门控检测等。
三、典型应用
该模块常应用于以下 Tokyo Electron 设备系统中：
晶圆搬运系统（如 EFEM、Load Port）传感器输入
真空腔体门锁状态检测
安全互锁信号采集
工艺启动/停止按钮输入
气阀、气缸的行程限位信号反馈
英文资料：
Product Name: 3D81-050026-V1 Digital Input Module
Manufacturer: Tokyo Electron Ltd
Product type: Digital Input Module
1、 Product Overview
3D81-050026-V1 is a dedicated input module used in Tokyo Electron semiconductor equipment for collecting digital signals (switch signals). This module is used to receive on/off status from external devices such as sensors, buttons, and limit switches, and convert it into logical signals that can be processed by the control system.
2、 Core functions
Digital signal acquisition
Real time reception of binary (on/off) input signals from multiple channels for the main control system to make logical judgments.
Signal isolation protection
The input channel usually has optocoupler or electrical isolation design to prevent voltage interference or signal backflow.
Status feedback display
Can be equipped with status indicator lights for easy on-site viewing of input signal status.
high speed response
Suitable for control tasks that require response time, such as safety interlock, door control detection, etc.
3、 Typical applications
This module is commonly used in the following Tokyo Electron device systems:
Sensor inputs for wafer handling systems (such as EFEM, Load Port)
Vacuum chamber door lock status detection
Security interlock signal acquisition
Process start/stop button input
Feedback of stroke limit signals for air valves and cylinders
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
