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TEL Tokyo Electron RPC-T0051A-11输入输出模块

发布时间:2025-07-04人气:
  • TEL Tokyo Electron RPC-T0051A-11输入输出模块

TEL Tokyo Electron  RPC-T0051A-11输入输出模块

1.产 品 资 料 介 绍:

中文资料:

TEL Tokyo Electron RPC-T0051A-11 输入输出模块 是一款用于半导体制造设备中的I/O信号控制板,属于东京电子公司设备的关键电子模块之一。该模块主要用于在设备的控制系统与外部执行部件之间进行输入/输出信号的采集与分发,是保障设备自动化运行的重要部件。


一、产品功能

  1. 信号传输与逻辑控制

    • 实现控制系统对设备执行机构(如电机、气缸、阀门等)的控制信号输出;

    • 接收来自传感器或设备状态反馈部件的输入信号,上传至主控制器。

  2. 电气隔离与保护

    • 具备电气隔离功能,可有效保护主控电路免受外部信号干扰或过载影响;

    • 提供过流、过压等基础保护功能,确保设备稳定运行。

  3. 模块化接口

    • 采用标准接口,可方便地进行安装、更换或维护;

    • 支持多通道输入输出,适配复杂的控制需求。


二、应用领域

  1. 晶圆前道处理设备

    • 常用于TEL的Clean Track、ACT、Lithius等系列设备中;

    • 用于涂胶、显影、清洗等工序的控制与监测。

  2. 自动化控制系统

    • 应用于设备中运动部件(如机械臂、输送机构等)的信号控制与反馈;

    • 控制真空系统、压力阀、门锁等辅助设备的操作。

  3. 半导体制造工厂

    • 在12英寸、8英寸晶圆产线中作为核心控制模块运行;

    • 支持全天候高负载运行,对环境稳定性要求较高。

  4. 设备维护与升级

    • 作为易损电子模块,可在系统出现通信或控制故障时独立更换;

    • 支持旧型号设备的持续维修与技术延长使用周期。

英文资料:

The TEL Tokyo Electron RPC-T0051A-11 input/output module is an I/O signal control board used in semiconductor manufacturing equipment and is one of the key electronic modules of Tokyo Electronics Corporation's equipment. This module is mainly used for collecting and distributing input/output signals between the control system of the device and external executing components, and is an important component to ensure the automated operation of the device.


1、 Product Features

Signal transmission and logic control


Realize the control signal output of the control system for equipment actuators (such as motors, cylinders, valves, etc.);


Receive input signals from sensors or device status feedback components and upload them to the main controller.


Electrical isolation and protection


Equipped with electrical isolation function, it can effectively protect the main control circuit from external signal interference or overload effects;


Provide basic protection functions such as overcurrent and overvoltage to ensure stable operation of the equipment.


Modular interface


Using standard interfaces for easy installation, replacement, or maintenance;


Support multi-channel input and output, adapt to complex control requirements.


2、 Application Fields

Wafer pre-processing equipment


Commonly used in TEL's Clean Track, ACT, Lithium and other series of equipment;


Used for controlling and monitoring processes such as gluing, developing, and cleaning.


automatic control system


Used for signal control and feedback of moving parts in equipment, such as robotic arms and conveyor mechanisms;


Control the operation of auxiliary equipment such as vacuum systems, pressure valves, door locks, etc.


Semiconductor manufacturing factory


Operate as the core control module in 12 inch and 8-inch wafer production lines;


Supports high load operation 24/7, with high requirements for environmental stability.


Equipment maintenance and upgrade


As a vulnerable electronic module, it can be independently replaced in the event of communication or control failures in the system;


Support continuous maintenance and technical extension of the service life of old model devices.

2.产      品      展      示      

tel_tokyo_electron_board_ry_mtr_03_tob1_051_rpc-t0051a-11.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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