TEL Tokyo Electron 1D81-000381-16模拟输入电子模块
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1D81-000381-16 模拟输入电子模块 是一款用于东京电子（TEL）半导体设备中的高精度模拟信号采集单元，主要功能是接收来自各类模拟传感器（如温度、压力、流量、电压/电流信号等）的输入数据，并将其转换为可供控制系统处理的标准电信号。该模块是TEL设备实现高稳定性、高精度工艺控制的关键电子部件之一。
一、产品概述
| 项目 | 内容 |
|---|---|
| 产品名称 | 模拟输入电子模块（Analog Input Module） |
| 产品型号 | 1D81-000381-16 |
| 制造厂商 | Tokyo Electron Ltd.（东京电子） |
| 应用类别 | 数据采集与信号接口模块 |
二、核心功能
模拟信号采集
支持多通道模拟输入，通常用于读取温度传感器（如热电偶、RTD）、压力传感器、流量计等设备信号；
可采集电压（如 0–10V）、电流（如 4–20mA）等工业标准信号。
A/D转换与标准化输出
内部集成高精度模数转换器（ADC），将模拟量实时转换为数字信号；
转换后的数据可直接供主控系统读取，实现实时监控与控制。
系统集成与反馈
采集的数据可作为闭环控制系统的反馈输入，辅助实现 PID 控制、报警判断等功能；
与TEL主控板（CPU模块、逻辑处理模块等）进行通信，构建完整数据链路。
三、典型应用场景
温控系统
采集晶圆加热台、腔体壁面、流体输送路径等温区的实时温度数据。
压力/气体流量监测
接入压力变送器、流量计等传感器，监测工艺腔体、气体通道的运行状态。
工艺设备状态检测
检测清洗液液位、电源输出电压、化学气体浓度等关键工艺参数。
英文资料：
TEL Tokyo Electron 1D81-0000381-16 Analog Input Electronic Module is a high-precision analog signal acquisition unit used in Tokyo Electronics (TEL) semiconductor equipment. Its main function is to receive input data from various analog sensors (such as temperature, pressure, flow, voltage/current signals, etc.) and convert it into standard electrical signals that can be processed by the control system. This module is one of the key electronic components for TEL devices to achieve high stability and precision process control.
1、 Product Overview
Project Content
Product Name Analog Input Module
Product Model 1D81-000381-16
Manufacturer Tokyo Electron Ltd
Application category data acquisition and signal interface module
2、 Core functions
Analog signal acquisition
Supports multi-channel analog input, usually used to read signals from temperature sensors (such as thermocouples, RTDs), pressure sensors, flow meters, and other devices;
It can collect industrial standard signals such as voltage (e.g. 0-10V) and current (e.g. 4-20mA).
A/D conversion and standardized output
Internally integrated high-precision analog-to-digital converter (ADC), which converts analog signals into digital signals in real-time;
The converted data can be directly read by the main control system to achieve real-time monitoring and control.
System integration and feedback
The collected data can be used as feedback input for closed-loop control systems, assisting in PID control, alarm judgment, and other functions;
Communicate with the TEL main control board (CPU module, logic processing module, etc.) to establish a complete data link.
3、 Typical application scenarios
temperature control
Collect real-time temperature data of the wafer heating stage, chamber wall, and isothermal zone of the fluid transport path.
Pressure/gas flow monitoring
Connect pressure transmitters, flow meters, and other sensors to monitor the operating status of process chambers and gas channels.
Process equipment status detection
Detect key process parameters such as cleaning solution level, power output voltage, and chemical gas concentration.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
