TEL Tokyo Electron 3D81-000040-12处理器
1.产 品 资 料 介 绍:
中文资料:
Tokyo Electron 3D81-000040-12 处理器模块(Processor Module) 是一款集成于 TEL 半导体设备中的核心计算与控制单元,主要用于执行设备工艺控制逻辑、通信协议处理、数据采集与响应,是系统架构中的“主脑”组件之一。该模块通常应用于 TEL 的刻蚀(Etch)、CVD、清洗、晶圆搬运等设备的控制框架中,起着协调各子系统运行的关键作用。
一、基本信息
产品型号: 3D81-000040-12
产品名称: 处理器模块(Processor Board / CPU Module)
制造商: Tokyo Electron Ltd.(TEL)
安装方式: 控制背板插卡式 / 模块化机架结构
定位功能: 工艺控制主机 / 嵌入式工业CPU模块
二、主要功能
中央处理与控制
执行预设的设备运行逻辑程序;
处理所有来自 I/O 板卡、传感器模块、通信接口的数据输入;
管理执行输出动作,如开阀、控温、运行序列控制等。
通信协调
作为设备内部控制总线的主控节点,与其他控制板(如 I/O 板、通信模块、数字量板卡)进行高速通信;
提供以太网、串口(RS232/RS485)、CAN 或 TEL 专用总线支持。
数据处理与监控
实时采集、处理并记录设备关键运行参数;
向 HMI 显示系统或 MES 工厂系统发送运行状态与数据报告。
联锁与故障响应
管理安全联锁逻辑,处理异常停机、开门保护、气压异常等关键逻辑;
支持自动诊断与故障代码输出。
英文资料:
The Tokyo Electron 3D81-000040-12 Processor Module is a core computing and control unit integrated into TEL semiconductor equipment. It is mainly used to execute equipment process control logic, communication protocol processing, data acquisition and response, and is one of the "main brain" components in the system architecture. This module is usually applied in the control framework of TEL's etching (Etch), CVD, cleaning, wafer handling and other equipment, playing a key role in coordinating the operation of various subsystems.
1、 Basic Information
Product model: 3D81-000040-12
Product Name: Processor Board/CPU Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Installation method: Control backplane plug-in card/modular rack structure
Positioning function: Process control host/embedded industrial CPU module
2、 Main functions
Central Processing and Control
Execute the preset device running logic program;
Process all data inputs from I/O boards, sensor modules, and communication interfaces;
Manage the execution of output actions, such as valve opening, temperature control, and sequence control during operation.
Communication coordination
As the main control node of the internal control bus of the device, it performs high-speed communication with other control boards (such as I/O boards, communication modules, and digital cards);
Provide Ethernet, serial port (RS232/RS485), CAN or TEL dedicated bus support.
Data processing and monitoring
Real time collection, processing, and recording of key operating parameters of equipment;
Send operational status and data reports to the HMI display system or MES factory system.
Interlocking and Fault Response
Manage safety interlock logic, handle critical logic such as abnormal shutdown, door opening protection, and abnormal air pressure;
Support automatic diagnosis and fault code output.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218