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TEL Tokyo Electron 3D80-001480-V1电源单元组件

发布时间:2025-07-07人气:
  • TEL Tokyo Electron  3D80-001480-V1电源单元组件
  • TEL Tokyo Electron  3D80-001480-V1电源单元组件
  • TEL Tokyo Electron  3D80-001480-V1电源单元组件

TEL Tokyo Electron  3D80-001480-V1电源单元组件

1.产 品 资 料 介 绍:

中文资料:

Tokyo Electron 3D80-001480-V1 电源单元组件(Power Supply Unit Assembly) 是一款用于半导体设备中的工业级电源模块组件,专为 Tokyo Electron(TEL)高精密设备控制系统提供稳定、可靠的多路直流电源输出,保障各功能模块(如处理器、I/O控制板、接口模块、传感器系统等)长时间稳定运行。


一、基本信息

  • 产品型号: 3D80-001480-V1

  • 产品名称: 电源单元组件(Power Supply Unit Assembly)

  • 制造商: Tokyo Electron Ltd.(TEL)

  • 组件类型: 模块化电源系统 / 工业电源分配组件

  • 典型设备应用: TEL Etch、CVD、Coater/Developer、EFEM 等主控制机架内


二、核心功能

  1. 多路直流电源输出

    • 向多个子系统提供不同电压等级(如 +24V、+12V、+5V、±15V DC);

    • 满足控制系统、I/O模块、CPU板、显示模块等对电源的需求。

  2. 输入电压稳压与滤波

    • 接收 AC 或 DC 主输入电源,通过内部整流与稳压电路进行处理;

    • 内置滤波、浪涌抑制、过压保护等功能,提升系统稳定性。

  3. 模块化输出接口

    • 采用背板插接或航空插头方式,将电源输出连接到各控制板卡;

    • 支持冗余输出、独立通道管理,提高系统可靠性与维护效率。

  4. 系统状态监控

    • 具备输出状态监控、故障诊断(如过载、过温、欠压);

    • 可将电源状态信号反馈给主控系统(如3D81-或E244系列控制器)。

英文资料:

The Tokyo Electron 3D80-001480-V1 Power Supply Unit Assembly is an industrial grade power module component used in semiconductor equipment. It is designed to provide stable and reliable multi-channel DC power output for the high-precision equipment control system of Tokyo Electron (TEL), ensuring the long-term stable operation of various functional modules such as processors, I/O control boards, interface modules, sensor systems, etc.


1、 Basic Information

Product model: 3D80-001480-V1


Product Name: Power Supply Unit Assembly


Manufacturer: Tokyo Electron Ltd. (TEL)


Component type: Modular power system/Industrial power distribution component


Typical equipment applications: TEL Etch, CVD, Coater/Developer, EFEM and other main control racks


2、 Core functions

Multi channel DC power output


Provide different voltage levels (such as+24V,+12V,+5V, ± 15V DC) to multiple subsystems;


Meet the power requirements of control systems, I/O modules, CPU boards, display modules, etc.


Input voltage stabilization and filtering


Receive AC or DC main input power and process it through internal rectification and voltage regulation circuits;


Built in filtering, surge suppression, overvoltage protection and other functions enhance system stability.


Modular output interface


Connect the power output to each control board using backplane or aviation plugs;


Support redundant output and independent channel management to improve system reliability and maintenance efficiency.


System status monitoring


Capable of output status monitoring and fault diagnosis (such as overload, overheating, undervoltage);


The power status signal can be fed back to the main control system (such as 3D81- or E244 series controllers).

2.产      品      展      示      

daihen_wga-50e-v_rf_generator_stack_tel_tokyo_3d80-001480-v1_tested_working.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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