TEL Tokyo Electron XPC-T0090A-11接口板
1.产 品 资 料 介 绍:
中文资料:
产品名称: TEL Tokyo Electron XPC-T0090A-11 接口板
产品类型: 信号接口模块 / 控制板卡
一、产品应用领域
半导体设备控制系统
用于蚀刻、CVD、PVD、清洗等设备中,实现主控系统与传感器、执行器的信号接口功能。晶圆处理与传输模块
应用于晶圆搬运单元(如Load Port、机器人臂),用于信号传输与状态反馈。自动化设备的输入/输出接口
连接多路数字或模拟I/O信号,用于系统状态检测和控制指令输出。真空系统与工艺环境控制
在设备真空腔体或气体系统控制中用于监控与调节信号交互。多模块间通信桥接
支持不同模块或子系统之间的总线通信、数据同步,确保整体协调运行。
英文资料:
Product Name: TEL Tokyo Electron XPC-T0090A-11 Interface Board
Product Type: Signal Interface Module/Control Board
1、 Product application areas
Semiconductor equipment control system
Used for etching CVD、PVD、 Implement signal interface functions between the main control system, sensors, and actuators in cleaning and other equipment.
Wafer Processing and Transport Module
Applied to wafer handling units (such as load ports, robot arms) for signal transmission and status feedback.
Input/output interface of automation equipment
Connect multiple digital or analog I/O signals for system status detection and control instruction output.
Vacuum System and Process Environment Control
Used for monitoring and regulating signal interaction in equipment vacuum chambers or gas system control.
Multi module communication bridging
Support bus communication and data synchronization between different modules or subsystems to ensure overall coordinated operation.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218