TEL Tokyo Electron 3M81-001116-12电机单元分布板
1.产 品 资 料 介 绍:
产品名称:
TEL Tokyo Electron 3M81-001116-12 电机单元分布板
(Motor Unit Distribution Board)
产品功能:
该电路板作为电机控制系统中的分布式连接和信号管理模块,主要负责:
电机控制信号的接收与分发
驱动单元的功率与反馈接口连接
电机状态监测信号汇总
电流、电压等运行参数的数据分配与中继传输
主要应用领域:
1. 晶圆搬运系统
适用于晶圆传输模块(Wafer Transfer Module)中的多个电机控制,如机械臂、滑台、升降轴。
管理多轴电机运行状态,实现同步或顺序控制。
2. 自动对位与调节平台
与步进电机/伺服电机配合,用于执行精密位移操作。
支持 XY 平台、Z 轴升降、旋转轴等控制通道的分配。
3. 设备内部多电机系统管理
管理多个电机的分布式连接,统一供电与信号接口。
提供电源隔离、接口保护、电机联锁等功能。
4. 真空腔体内执行机构驱动
控制腔体内真空阀门驱动器、升降平台、传送滑轨等部件。
具备抗干扰与高可靠性信号传输能力。
英文资料:
TEL Tokyo Electron 3M81-001116-12 Motor Unit Distribution Board
(Motor Unit Distribution Board)
Product Features:
This circuit board serves as a distributed connection and signal management module in the motor control system, mainly responsible for:
Reception and distribution of motor control signals
Power and feedback interface connection of the driving unit
Summary of motor status monitoring signals
Data allocation and relay transmission of operating parameters such as current and voltage
Main application areas:
1. Wafer handling system
Suitable for controlling multiple motors in wafer transfer modules, such as robotic arms, slide tables, and lifting shafts.
Manage the operation status of multi axis motors to achieve synchronous or sequential control.
2. Automatic alignment and adjustment platform
Used in conjunction with stepper motors/servo motors to perform precise displacement operations.
Support the allocation of control channels such as XY platform, Z-axis lifting, and rotation axis.
3. Internal multi motor system management of equipment
Manage distributed connections of multiple motors and unify power supply and signal interfaces.
Provide functions such as power isolation, interface protection, and motor interlocking.
4. Drive the actuator inside the vacuum chamber
Control the vacuum valve driver, lifting platform, conveyor slide and other components inside the chamber.
Capable of anti-interference and high reliability signal transmission.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218