TEL Tokyo Electron 3D81-000020-15印刷电路板
1.产 品 资 料 介 绍:
产品名称:
TEL Tokyo Electron 3D81-000020-15 印刷电路板(PCB)
产品类型:
电子控制模块 / 印刷电路板
主要应用领域:
半导体制造设备
用于 Tokyo Electron 旗下的半导体设备,如 CVD、Etcher、PVD 系统。
实现过程控制、数据采集、信号调度等功能。
晶圆处理系统
控制晶圆在传输、对准、搬运等环节的动作。
支持设备精密控制与状态反馈。
真空系统控制
应用于高真空环境的控制或监测电路中。
连接真空传感器、MFC(质量流量控制器)、加热元件等部件。
I/O 控制与设备通信
担当输入输出接口模块,连接传感器、执行器、马达等元件。
负责数据交互与系统同步控制。
自动化控制与安全管理
提供报警、温控、连锁等保护控制功能。
适配多种模块协同工作,提升设备运行的稳定性和安全性。
英文资料:
Product Name:
TEL Tokyo Electron 3D81-000020-15 Printed Circuit Board (PCB)
Product type:
Electronic control module/printed circuit board
Main application areas:
Semiconductor Manufacturing Equipment
Used for semiconductor equipment under Tokyo Electron, such as CVD, Etcher, PVD systems.
Implement functions such as process control, data acquisition, and signal scheduling.
Wafer processing system
Control the actions of wafers during transportation, alignment, and handling.
Support precision control and status feedback of equipment.
Vacuum system control
Applied in control or monitoring circuits for high vacuum environments.
Connect components such as vacuum sensors, MFC (Mass Flow Controller), heating elements, etc.
I/O control and device communication
Serve as an input/output interface module, connecting sensors, actuators, motors, and other components.
Responsible for data exchange and system synchronization control.
Automation Control and Safety Management
Provide protection and control functions such as alarm, temperature control, and interlocking.
Adapt multiple modules to work together and improve the stability and safety of device operation.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218