TEL Tokyo Electron 1981-604035-11控制主板卡件

TEL Tokyo Electron  1981-604035-11控制主板卡件

1.产 品 资 料 介 绍：

产品名称：

TEL Tokyo Electron 1981-604035-11 控制主板卡件
（Control Main Board / Control PCB Assembly）

产品功能简介：

该卡件是 Tokyo Electron 半导体设备中用于设备核心控制系统的主控板（Main Control Board），其作用类似于工业控制系统中的“中央处理单元”，主要功能包括：

• 作为设备中枢控制单元，执行主控制逻辑

• 管理各子模块的通信、数据交互与动作协调

• 采集传感器信号，分析处理后发出控制命令

• 控制执行机构（如电机、阀门、气缸、加热器等）进行精密操作

• 与上位系统（如人机界面 HMI、MES 系统）通信并同步状态数据

主要应用领域：

1. 半导体制造工艺控制

• 用于 TEL 的 CVD、Etcher、PVD 等设备中，管理关键工艺参数（温度、压力、时间、气体流量等）

• 精确控制加工流程步骤，确保产品一致性和良率

2. 晶圆搬运与自动化控制系统

• 管理晶圆在 EFEM、Load Port、Transfer 模块等中的位置移动与流程控制

• 控制对位、搬运、装载、卸载、升降等复杂动作逻辑

3. 设备安全联锁与故障处理

• 实时监测设备运行状态，执行紧急停机、故障报警、错误日志记录等保护功能

• 支持 ESD、过流、过压等异常状态响应处理

4. 通信与接口控制

• 搭载工业通信接口（如 RS-232/485、Ethernet、CAN）与其它控制板卡及工厂网络对接

• 管理与人机界面（HMI）及上位软件的命令传输与状态反馈

英文资料：

TEL Tokyo Electron 1981-604035-11 Control Motherboard Card

（Control Main Board / Control PCB Assembly）

Product Function Introduction:

This card is the main control board used in the core control system of Tokyo Electron semiconductor equipment. Its function is similar to the "central processing unit" in industrial control systems, and its main functions include:

As the central control unit of the device, execute the main control logic

Manage the communication, data exchange, and action coordination of each submodule

Collect sensor signals, analyze and process them, and issue control commands

Control actuators (such as motors, valves, cylinders, heaters, etc.) for precise operation

Communicate with upper level systems (such as human-machine interface HMI, MES system) and synchronize status data

Main application areas:

1. Semiconductor manufacturing process control

Used in TEL CVD, Etcher, PVD and other equipment to manage key process parameters (temperature, pressure, time, gas flow rate, etc.)

Accurately control the processing steps to ensure product consistency and yield

2. Wafer handling and automation control system

Manage the position movement and process control of wafers in EFEM, Load Port, Transfer module, etc

Control complex action logic such as alignment, handling, loading, unloading, lifting, etc

3. Equipment safety interlocking and fault handling

Real time monitoring of equipment operation status, execution of emergency shutdown, fault alarm, error log recording and other protective functions

Support response handling for abnormal states such as ESD, overcurrent, overvoltage, etc

4. Communication and Interface Control

Equipped with industrial communication interfaces (such as RS-232/485, Ethernet, CAN) to interface with other control boards and factory networks

Command transmission and status feedback of management and human-machine interface (HMI) and upper software

2.产      品      展      示      

3.其他产品

B&R 5AC600.GPI0-K05 印刷电路板

BANNER LS4RLQ传感器.

DASO110 57120001-AT1输入模块

4.其他英文产品

ABB P8840 8-channel temperature module

HONEYWELL TK-FTEB01 51309512-175 Bridge

RADISYS 61-0159-03 CPU circuit board

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218