TEL Tokyo Electron MR-MC01-S100控制器模块
1.产 品 资 料 介 绍：
产品名称：
TEL Tokyo Electron MR-MC01-S100 控制器模块
（Controller Module）
产品功能简介：
MR-MC01-S100 控制器模块是 TEL（Tokyo Electron）设备中专用于高精度运动控制或自动化流程控制的核心部件。该模块通常集成微处理器、I/O 控制接口、通信接口以及电机控制逻辑，是实现设备精密动作执行的控制核心。
主要功能包括：
控制步进电机或伺服电机的运行与定位
实现多轴联动、速度控制、加减速曲线生成
接收来自上位系统的动作指令，进行逻辑处理与反馈
支持传感器输入与限位检测，保障设备安全运行
提供与主控系统或人机界面的通信能力（如 RS-232/485、Ethernet、CAN 等）
主要应用领域：
1. 晶圆搬运与定位系统控制
管理 EFEM、Transfer Module、Aligner 等子系统中搬运臂、对位平台等部件的精准动作
执行晶圆从 FOUP → Load Port → 工艺腔体的搬运路径逻辑
2. 多轴电机控制
控制多个执行轴（X、Y、Z 或 θ 轴）协同运动，实现精准机械结构控制
可设定参数如速度、加速度、目标位置、回零等
3. 真空系统或气体系统部件控制
控制与真空阀、气体阀、电磁机构联动动作，实现工艺联锁逻辑
在处理过程中精准控制时间、顺序和动作幅度
4. 工艺流程逻辑控制
执行步进式的加工流程（如预热、加压、等离子激活等）中的动作协调
管理执行器、感测元件的启停与状态反馈
英文资料：
TEL Tokyo Electron MR-MC01-S100 Controller Module
（Controller Module）
Product Function Introduction:
The MR-MC01-S100 controller module is a core component specifically designed for high-precision motion control or automated process control in TEL (Tokyo Electron) equipment. This module typically integrates a microprocessor, I/O control interface, communication interface, and motor control logic, and is the control core that enables precise execution of equipment actions.
The main functions include:
Control the operation and positioning of stepper motors or servo motors
Realize multi axis linkage, speed control, and acceleration/deceleration curve generation
Receive action instructions from the upper system, perform logical processing and feedback
Support sensor input and limit detection to ensure safe operation of equipment
Provide communication capabilities with the main control system or human-machine interface (such as RS-232/485, Ethernet, CAN, etc.)
Main application areas:
1. Control of wafer handling and positioning system
Manage precise movements of handling arms, alignment platforms, and other components in subsystems such as EFEM, Transfer Module, and Aligner
Execute the logic of the wafer transport path from FOUP → Load Port → Process Chamber
2. Multi axis motor control
Control the coordinated motion of multiple execution axes (X, Y, Z, or θ axis) to achieve precise mechanical structure control
Parameters such as speed, acceleration, target position, zeroing, etc. can be set
3. Control of components in vacuum or gas systems
Control the linkage of vacuum valves, gas valves, and electromagnetic mechanisms to achieve process interlocking logic
Accurately control time, sequence, and action amplitude during the processing
4. Logical control of process flow
Coordinate actions in step-by-step machining processes such as preheating, pressurization, plasma activation, etc
Manage the start stop and status feedback of actuators and sensing components
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
