TEL Tokyo Electron 2184-020214-12数字量控制板卡

TEL Tokyo Electron   2184-020214-12数字量控制板卡

1.产 品 资 料 介 绍：

产品名称：

TEL Tokyo Electron 2184-020214-12 数字量控制板卡
（Digital I/O Control Board）

产品功能简介：

该数字量控制板卡是 Tokyo Electron（TEL）半导体设备中的核心 I/O 控制模块，用于管理与设备中各类数字信号的输入与输出，并协调传感器、执行器、开关等设备的逻辑控制。主要功能包括：

• 接收来自按钮、开关、传感器等外部设备的数字输入信号

• 向电磁阀、继电器、蜂鸣器、指示灯等输出控制信号

• 支持多路数字量通道，具备高速、稳定的数据处理能力

• 与主控系统或 PLC 通信，实现工艺流程中的自动控制逻辑

• 具备输入滤波、输出短路保护、状态监测等功能，提升系统安全性

主要应用领域：

1. 工艺流程控制与动作执行

• 控制腔体门启闭、载盘升降、气阀切换、报警输出等典型数字控制任务

• 接收设备状态信号如传感器触发、到位信号、工艺准备完成等输入

2. 设备联锁与安全控制

• 实现设备级别的安全联锁逻辑，例如真空未达禁止动作、门未关无法启动等

• 管理急停、电源保护、运行/停止等关键操作条件

3. I/O 状态监测与调试支持

• 提供信号指示灯与在线监测接口，便于故障诊断与维护

• 便于设备的工艺调试和控制系统联调

英文资料：

TEL Tokyo Electron 2184-020214-12 Digital Control Board

（Digital I/O Control Board）

Product Function Introduction:

This digital control board is the core I/O control module in Tokyo Electron (TEL) semiconductor equipment, used to manage the input and output of various digital signals in the equipment, and coordinate the logic control of sensors, actuators, switches, and other devices. The main functions include:

Receive digital input signals from external devices such as buttons, switches, sensors, etc

Output control signals to solenoid valves, relays, buzzers, indicator lights, etc

Supports multiple digital channels with high-speed and stable data processing capabilities

Communicate with the main control system or PLC to achieve automatic control logic in the process flow

Equipped with input filtering, output short-circuit protection, status monitoring and other functions to enhance system safety

Main application areas:

1. Process control and action execution

Typical digital control tasks such as controlling the opening and closing of chamber doors, lifting and lowering of loading trays, switching of air valves, and alarm output

Receive device status signals such as sensor triggers, in place signals, process preparation completion, and other inputs

2. Equipment interlocking and safety control

Implement safety interlock logic at the device level, such as prohibiting actions when the vacuum is not reached, inability to start when the door is not closed, etc

Manage critical operating conditions such as emergency stop, power protection, operation/stop, etc

3. I/O status monitoring and debugging support

Provide signal indicator lights and online monitoring interfaces for easy fault diagnosis and maintenance

Facilitating the process debugging of equipment and the joint debugging of control systems

2.产      品      展      示      

3.其他产品

BEIJER E1043触摸屏

HONEYWELL 51309152-175C模拟输出模块

 061-01183-0031控制器模块

4.其他英文产品

ABB UN0503a-P Digital Output Module

GESAS CAN-DCM digital amplifier module

GE IS210BPPBH2CAA Printed Circuit Board

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218