TEL Tokyo Electron 3M80-001588-12处理器模块
1.产 品 资 料 介 绍：
产品名称：
产品名称
TEL Tokyo Electron 3M80-001588-12 处理器模块
所属设备
适用于 Tokyo Electron 半导体制造设备，特别是 SW300B 系统中的一部分。
模块作用
该模块属于 AIO2（多功能输入/输出）子板，安装于主控制板（如 32M81-023609-15）上，负责：
数据采集与传输
控制逻辑处理
信号输入/输出协调
与其他子模块协作完成系统控制任务
应用领域
广泛应用于 Tokyo Electron 的刻蚀机、薄膜沉积设备、清洗系统等半导体前端工艺设备中，执行以下任务：
控制气体流量、温度、电压、电流等参数
接收传感器信号并传输至主控系统
控制执行元件的逻辑行为（如真空阀、RF功率输出等）
技术特性（推测）
由于为专用模块，未公开详细参数，但一般具备以下特征：
高可靠性工业级 PCB
配合主控板使用，不独立运行
具备一定防静电、抗干扰能力
使用特定总线或专有协议与系统通信
英文资料：
product name
TEL Tokyo Electron 3M80-001588-12 processor module
Belonging equipment
Suitable for Tokyo Electron semiconductor manufacturing equipment, especially as part of the SW300B system.
Module function
This module belongs to the AIO2 (Multi functional Input/Output) sub board and is installed on the main control board (such as 32M81-023609-15). It is responsible for:
Data collection and transmission
Control logic processing
Signal input/output coordination
Collaborate with other submodules to complete system control tasks
application area
Widely used in Tokyo Electron's etching machines, thin film deposition equipment, cleaning systems, and other semiconductor front-end process equipment to perform the following tasks:
Control gas flow rate, temperature, voltage, current and other parameters
Receive sensor signals and transmit them to the main control system
Control the logical behavior of executing components (such as vacuum valves, RF power output, etc.)
Technical characteristics (speculation)
Due to being a dedicated module, detailed parameters have not been disclosed, but it generally has the following characteristics:
High reliability industrial grade PCB
Used in conjunction with the main control board, not running independently
Having certain anti-static and anti-interference capabilities
Communicate with the system using a specific bus or proprietary protocol
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
