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TEL Tokyo Electron BX80-000062-V1控制器机架

发布时间:2025-07-10人气:
  • TEL Tokyo Electron BX80-000062-V1控制器机架
  • TEL Tokyo Electron BX80-000062-V1控制器机架

TEL Tokyo Electron  BX80-000062-V1控制器机架

1.产 品 资 料 介 绍:

产品名称:

Tokyo Electron (TEL) BX80-000062-V1 控制器机架 — 产品应用领域详解


1. 半导体制造设备中的主控框架

  • 核心作用:BX80-000062-V1 控制器机架是安装和集成多块控制模块、电源单元、通信接口板等核心组件的机械与电气平台。

  • 主要任务:统一承载和管理设备控制系统所需的各类控制板卡和模块,形成系统级控制架构。

  • 应用设备:广泛用于光刻机、刻蚀机、涂胶显影机、CVD 等关键半导体生产设备。


2. 控制系统模块化部署平台

  • 模块安装:支持多插槽结构,可灵活配置 CPU 板、I/O 控制板、通讯板等。

  • 便于维护:模块化设计方便快速更换故障组件,提升设备可维护性和稼动率。

  • 扩展性强:根据工艺或控制需求可添加/移除控制单元,适应不同产品线。


3. 系统通信与电源集中管理

  • 通信整合:机架内部布设通信总线,为控制器各模块之间提供统一高速数据通道(如VME、PCIe或专有总线)。

  • 电源分配:集成统一的电源接口和分配结构,为每个模块提供稳定电源,降低布线复杂度。

英文资料:

Tokyo Electron (TEL) BX80-000062-V1 Controller Rack - Detailed Explanation of Product Application Fields


1. Main control framework in semiconductor manufacturing equipment

Core function: The BX80-000062-V1 controller rack is a mechanical and electrical platform for installing and integrating multiple control modules, power units, communication interface boards, and other core components.


Main task: Unify and manage various control boards and modules required for equipment control systems, forming a system level control architecture.


Application equipment: Widely used in key semiconductor production equipment such as lithography machines, etching machines, coating and developing machines, CVD, etc.


2. Modular deployment platform for control system

Module installation: Supports multi slot structure, allowing flexible configuration of CPU board, I/O control board, communication board, etc.


Easy to maintain: Modular design facilitates quick replacement of faulty components, improving equipment maintainability and utilization rate.


Strong scalability: Control units can be added/removed according to process or control requirements to adapt to different product lines.


3. System communication and centralized power management

Communication integration: Communication buses are installed inside the rack to provide a unified high-speed data channel (such as VME, PCIe, or proprietary buses) between various modules of the controller.


Power distribution: Integrating a unified power interface and distribution structure to provide stable power for each module and reduce wiring complexity.

2.产      品      展      示      

tel_-_tokyo_electron_ltd_ecc2_controller_ec_rack_bx80-000062-v1_equipment_cont.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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