TEL Tokyo Electron 3D81-000102-V1接口板

TEL Tokyo Electron  3D81-000102-V1接口板

1.产 品 资 料 介 绍：

产品名称：

Tokyo Electron (TEL) 3D81-000102-V1 接口板 — 产品应用领域详解

一、产品功能定位

3D81-000102-V1 接口板是 Tokyo Electron 半导体制造设备中用于信号转换、控制通信和模块互联的重要部件。它作为设备控制系统与外部执行单元之间的数据桥梁，在设备运行过程中起到“控制中枢延伸”的作用。

二、主要应用领域

1. 设备模块间通信接口

• 功能说明：将主控系统（如主控制器、处理器模块）与子系统（如气体控制单元、温控模块、马达控制器）连接；

• 应用价值：确保各功能模块间信号完整性与同步操作，提升系统反应速度与整体协同能力；

• 典型设备：用于 TEL 的刻蚀机、CVD 设备、显影系统等中。

2. I/O 信号输入输出分发与管理

• 功能说明：负责收集来自传感器、执行机构（如电磁阀、伺服马达等）的输入信号，并输出控制信号；

• 接口类型：可能包含数字量（DI/DO）、模拟量（AI/AO）、通讯端口（如 RS-232、RS-485、CAN、Ethernet 等）；

• 作用场景：温度控制、气流调节、压力检测、电机驱动信号交互等。

英文资料：

Tokyo Electron (TEL) 3D81-000102-V1 Interface Board - Detailed Explanation of Product Application Fields

1、 Product functional positioning

The 3D81-000102-V1 interface board is an important component used for signal conversion, control communication, and module interconnection in Tokyo Electron semiconductor manufacturing equipment. It serves as a data bridge between the device control system and external execution units, playing a role as a "control center extension" during the operation of the device.

2、 Main application areas

1. Communication interface between device modules

Function description: Connect the main control system (such as the main controller, processor module) with subsystems (such as gas control unit, temperature control module, motor controller);

Application value: Ensure signal integrity and synchronous operation between various functional modules, improve system response speed and overall collaboration capability;

Typical equipment: used in TEL etching machines, CVD equipment, developing systems, etc.

2. I/O signal input/output distribution and management

Function description: Responsible for collecting input signals from sensors, actuators (such as solenoid valves, servo motors, etc.), and outputting control signals;

Interface types: may include digital signals (DI/DO), analog signals (AI/AO), communication ports (such as RS-232, RS-485, CAN, Ethernet, etc.);

Application scenarios: temperature control, airflow regulation, pressure detection, motor drive signal interaction, etc.

2.产      品      展      示      

3.其他产品

VE5010 输入模块

REXROTH PPC-R22.1N-T-NN-P1-NN-FW 伺服控制器

ATLAS COPCO TC-4000-S-ES伺服控制器

4.其他英文产品

ASEA DSQC108 controller backplane

FOXBORO RH926GH Control Input Card

Fanuc A06B-6115-H006 servo drive

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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