TEL Tokyo Electron 3S80-000007-11涡轮增压泵

TEL Tokyo Electron  3S80-000007-11涡轮增压泵

1.产 品 资 料 介 绍：

产品名称：

Tokyo Electron (TEL) 3S80-000007-11 涡轮增压泵 — 产品应用领域详解

一、产品功能定位

3S80-000007-11 涡轮增压泵（Turbo Molecular Pump，简称 TMP）是 Tokyo Electron 半导体设备中用于维持真空环境的核心部件之一。它通常用于中高真空段，具有高速旋转叶轮结构，适用于对洁净度、稳定性要求极高的真空工艺。

二、主要应用领域

1. 半导体真空处理设备的真空系统

• 核心作用：为晶圆加工腔体（如刻蚀腔、CVD 腔、PVD 腔等）提供中高真空环境；

• 目标真空范围：10⁻³ Pa 至 10⁻⁶ Pa；

• 典型设备：

  • 等离子刻蚀设备（Etcher）

  • 原子层沉积（ALD）系统

  • 化学气相沉积（CVD）

  • 金属有机化学气相沉积（MOCVD）

2. 高洁净工艺环境维持

• 无油结构：涡轮分子泵不使用润滑油，杜绝油污染，适用于超高洁净环境；

• 低振动/低噪音：适合敏感工艺操作，如薄膜沉积、离子注入、真空退火等；

• 反应控制：为高精度温控、气流控制提供稳定真空基础。

英文资料：

Tokyo Electron (TEL) 3S80-00007-11 Turbocharging Pump - Product Application Field Detailed Explanation

1、 Product functional positioning

The 3S80-00007-11 Turbo Molecular Pump (TMP) is one of the core components used to maintain a vacuum environment in Tokyo Electron semiconductor equipment. It is usually used in medium to high vacuum sections, with a high-speed rotating impeller structure, suitable for vacuum processes that require extremely high cleanliness and stability.

2、 Main application areas

1. Vacuum system of semiconductor vacuum processing equipment

Core function: To provide a medium to high vacuum environment for wafer processing chambers (such as etching chambers, CVD chambers, PVD chambers, etc.);

Target vacuum range: 10 ⁻³ Pa to 10 ⁻⁶ Pa;

Typical equipment:

Plasma etching equipment (Etcher)

Atomic Layer Deposition (ALD) System

Chemical Vapor Deposition (CVD)

Metal Organic Chemical Vapor Deposition (MOCVD)

2. Maintenance of High Cleanliness Process Environment

Oil free structure: The turbo molecular pump does not use lubricating oil, eliminating oil pollution and suitable for ultra clean environments;

Low vibration/low noise: suitable for sensitive process operations such as thin film deposition, ion implantation, vacuum annealing, etc;

Reaction control: provides a stable vacuum foundation for high-precision temperature control and airflow control.

2.产      品      展      示      

3.其他产品

REXROTH PPC-R22.1N-T-NN-P1-NN-FW 伺服控制器

ATLAS COPCO TC-4000-S-ES伺服控制器

 4522-167-02301诊断板

4.其他英文产品

Fanuc A06B-6115-H006 servo drive

NI PCI4451 Data Acquisition Card

Emerson P144.R4 Intelligent I/O Board

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218