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Tokyo Electron 2981-600465-11连接板

发布时间:2025-07-11人气:
  • Tokyo Electron 2981-600465-11连接板
  • Tokyo Electron 2981-600465-11连接板
  • Tokyo Electron 2981-600465-11连接板

TEL Tokyo Electron 2981-600465-11连接板

1.产 品 资 料 介 绍:

产品名称:

Tokyo Electron 2981-600465-11 连接板 是应用于TEL半导体设备中的专用接口组件,主要用于设备内部模块之间的电信号连接与分配。

一、主要功能

  • 实现控制板与其他功能模块之间的电信号传输。

  • 提供稳定的电源与信号连接,支持高速数据和低噪声传输。

  • 用于设备模块化设计中的统一接口平台,便于安装与维护。

二、应用领域

  1. 半导体蚀刻设备:在主控系统与真空腔体、传感器、执行器之间建立连接。

  2. 薄膜沉积设备(CVD/ALD):连接腔体内部温控单元、气体阀组、真空监控部件。

  3. 光刻设备:作为光源控制模块与系统控制主板之间的信号通道。

  4. 清洗或显影设备(Clean Track):用于将多个子模块与中央控制单元连接。

三、特性

  • 多通道信号接口,适用于复杂的内部控制系统。

  • 配备标准连接器,便于模块化维护更换。

  • 布线结构规范,符合TEL设备电磁兼容与电气安全要求。

英文资料:

The Tokyo Electron 2981-600465-11 connection board is a specialized interface component used in TEL semiconductor equipment, mainly for electrical signal connection and distribution between internal modules of the equipment.


1、 Main functions

Realize the transmission of electrical signals between the control board and other functional modules.


Provide stable power and signal connections, support high-speed data and low-noise transmission.


A unified interface platform for modular design of equipment, facilitating installation and maintenance.


2、 Application Fields

Semiconductor etching equipment: Establish connections between the main control system and the vacuum chamber, sensors, and actuators.


Thin film deposition equipment (CVD/ALD): Connect the temperature control unit, gas valve group, and vacuum monitoring components inside the chamber.


Lithography equipment: serves as a signal channel between the light source control module and the system control motherboard.


Cleaning or developing equipment (Clean Track): used to connect multiple submodules to the central control unit.


3、 Characteristics

Multi channel signal interface, suitable for complex internal control systems.


Equipped with standard connectors for modular maintenance and replacement.


The wiring structure specification complies with the electromagnetic compatibility and electrical safety requirements of TEL equipment.

2.产      品      展      示      

tel_board_dcc_sub_unit_conn_001_2981-600465-11.jpg

3.其他产品

KJ3222X1-BA1模拟输入模块

KOLLMORGEN CP310250 PRD-P310250Z-55  伺服驱动器

 61-0475-20轴控制模块

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ABB P8480 Analog Output Module

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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