1.产 品 资 料 介 绍：
TEL 3D81-000044-V5 控制器模块
- TEL 3D81-000044-V5 适配 TEL 刻蚀、沉积半导体设备主控
- 实时采集腔体温压、气体流量各类传感信号
- 内置信号滤波，抵御车间电磁干扰
- 高速运算处理，工艺指令响应迅速
- 多通道 IO 端口，对接阀门、MFC、机械手组件
- 多协议通讯，连通上位机与整机各子板卡
- 自带故障自检，通道异常快速上报报警
- 插卡模块化结构，拆装替换简单快捷
- 无尘级线路工艺，适配洁净厂房工况
- 多重电气保护，过压过流自动切断防护
- 板载存储，长期保存设备工艺运行参数
- 优化散热布局，可 24 小时连续稳定运行
- 兼容同系列 3D81 控制模组，设备拓展方便
- 出厂完整校准调试，现场装机少调试
- 紧凑板卡尺寸，节省设备控制柜内部空间综上，TEL 3D81-000044-V5 控制器模块运算稳定、集成度高，是 TEL 薄膜、刻蚀设备核心控制板卡
TEL 3D81-000044-V5控制器模块 产品英文
TEL 3D81-000044-V5 Controller Module
TEL 3D81-000044-V5 is compatible with TEL etching and deposition semiconductor equipment main control
Real time collection of various sensing signals such as chamber temperature, pressure, and gas flow rate
Built in signal filtering to resist electromagnetic interference in the workshop
High speed computational processing, rapid response to process instructions
Multi channel IO ports, compatible with valves MFC、 Mechanical arm components
Multi protocol communication, connecting the upper computer with various sub boards of the whole machine
Built in fault self check, quick reporting and alarm for channel abnormalities
Card insertion modular structure, easy and fast disassembly and replacement
Dust free circuit technology, suitable for clean factory working conditions
Multiple electrical protections, automatic cut-off protection against overvoltage and overcurrent
Onboard storage, long-term preservation of equipment process operating parameters
Optimized heat dissipation layout for 24-hour continuous stable operation
Compatible with 3D81 control modules of the same series, easy to expand equipment
Complete calibration and debugging at the factory, minimal on-site installation and debugging
Compact board size, saving internal space of equipment control cabinet
Overall, the TEL 3D81-000044-V5 controller module has stable computation and high integration, making it the core control board for TEL thin film and etching equipment
TEL 3D81-000044-V5控制器模块 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
