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AMAT Applied Materials 0190-09378单相驱动器

发布时间:2025-09-25人气:
  • AMAT Applied Materials 0190-09378单相驱动器
  • AMAT Applied Materials 0190-09378单相驱动器
  • AMAT Applied Materials 0190-09378单相驱动器

AMAT Applied Materials 0190-09378单相驱动器

1.产 品 资 料 介 绍:

AMAT Applied Materials 0190‑09378 是一款工业级单相驱动器,适配 Centura、Endura、P5000 等半导体制造设备,用于驱动风扇、泵、真空系统等单相电机,支持 PWM / 模拟量调速及多种保护功能。

核心规格

项目规格备注
适用平台Centura、Endura、P5000、Producer 等多腔室晶圆制造系统
输入电压单相 AC 220V±10%,50/60Hz典型值
输出功率≤1 kW(依电机而定)适配中小功率负载
调速方式PWM 或 0–10 V 模拟量外部信号控制
保护功能过流、欠压、过压、过热、堵转保护可自动重启
接口类型端子 / 接插件,支持 FG/RD 反馈便于状态监测
工作温度-10℃~60℃建议风冷散热
外形尺寸约 235×190×172 mm面板或底座安装
重量≈5.6 kg金属外壳

性能特点

  • 高可靠性:适应晶圆制造环境的频繁启停与长时间运行要求。
  • 低噪声设计:优化载波频率,降低电磁干扰,确保设备稳定运行。
  • 易于集成:标准接口与安装尺寸,可快速替换同类型驱动器。
  • 宽电压适应:AC 180–265 V 输入,适应不同电网条件。

典型应用

  • 刻蚀(Etch)与化学气相沉积(CVD)系统的冷却风扇
  • 物理气相沉积(PVD)设备的真空系统泵浦
  • 晶圆传输腔室的气体循环风机

AMAT Applied Materials  0190-09378单相驱动器  英文资料:

AMAT Applied Materials 0190-09378 is an industrial grade single-phase driver that is compatible with semiconductor manufacturing equipment such as Centura, Endura, P5000, etc. It is used to drive single-phase motors such as fans, pumps, vacuum systems, etc. It supports PWM/analog speed regulation and various protection functions.

Core specifications

Project specification remarks

Suitable for multi chamber wafer manufacturing systems such as Centura, Endura, P5000, Producer, etc

Input voltage single-phase AC 220V ± 10%, 50/60Hz typical value

Output power ≤ 1 kW (depending on the motor) suitable for small and medium power loads

Speed regulation method PWM or 0-10V analog external signal control

Protection functions include overcurrent, undervoltage, overvoltage, overheating, and locked rotor protection, which can automatically restart

Interface type terminal/connector, supporting FG/RD feedback for easy status monitoring

Working temperature -10 ℃~60 ℃, it is recommended to use air cooling for heat dissipation

Dimensions approximately 235 × 190 × 172 mm for panel or base installation

Weight ≈ 5.6 kg Metal shell

Performance Characteristics

High reliability: Adapt to the frequent start stop and long-term operation requirements of wafer manufacturing environment.

Low noise design: Optimize carrier frequency, reduce electromagnetic interference, and ensure stable operation of equipment.

Easy to integrate: standard interface and installation size, can quickly replace drives of the same type.

Wide voltage adaptation: AC 180-265 V input, suitable for different power grid conditions.

Typical Applications

Cooling fan for Etch and CVD systems

Vacuum system pumping for physical vapor deposition (PVD) equipment

Gas circulation fan for wafer transfer chamber

AMAT Applied Materials  0190-09378单相驱动器 产品展示      

applied_materials_0190-09378_wdrive_single_phase_phasetronics_amat.jpg

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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