AMAT Applied Materials 0190-77582适配器
1.产 品 资 料 介 绍：
- 工艺腔室阀门控制：驱动刻蚀机、PECVD 设备的反应腔真空阀门（如闸阀、蝶阀），通过精准行程控制阀门开度，调节腔室真空度与气体流量，保障工艺环境稳定性。
- 晶圆载台定位：用于晶圆传送腔室内的载台升降、平移机构，通过气缸的高精度定位特性，实现晶圆在传送机器人与工艺腔室间的精准对接，避免晶圆碰撞或位置偏移。
- 舱门与盖板启闭：适配设备维护舱门、工艺腔室盖板的气动启闭机构，结合磁性开关反馈位置状态，确保舱门完全闭合后设备才能启动工艺，防止工艺气体泄漏或真空失效。
- 夹持与顶起机构：在晶圆检测设备中，驱动晶圆夹持爪或顶针机构，实现晶圆的无损伤夹持与顶起，配合传感器完成晶圆厚度、平整度检测等动作。
- 主机设备适配：广泛应用于 AMAT Centura 刻蚀系统、Endura 沉积平台、Track 光刻辅助设备及晶圆检测设备。
- 配套模块兼容：与 AMAT 0225-01622 控制器、0100-20001 电子接口模块、气动电磁阀组（如 AMAT 0020 系列阀岛）直接对接，形成 “控制信号 - 气动驱动 - 位置反馈” 的闭环执行系统。
- 协同组件联动：可与真空传感器、压力开关联动，例如当腔室真空度达标后，气缸驱动阀门开启；若压力异常，立即触发气缸复位，切断工艺通路，保障设备安全。
- 安装前准备：确认安装区域洁净度符合 Class 10 标准，用异丙醇（99.999% 纯度）清洁气缸表面及安装面；检查气缸无划痕、活塞杆无弯曲，磁性开关接线完好；准备专用洁净级气管（如 PTFE 材质，内径 6mm）、扭矩扳手（精度 ±5%）及防静电工具。
- 硬件安装：按设备图纸固定气缸，确保活塞杆轴线与驱动机构中心线同轴度偏差≤0.1mm，避免侧向力导致气缸磨损；连接气管（气管需提前用氮气吹扫 3 次，清除杂质），气管接头采用卡套式连接，扭矩控制在 1.5-2N・m；固定磁性开关，调整其位置至气缸行程两端，确保活塞到达时能稳定触发信号。
- 调试与验证：接入压缩空气（压力调节至 0.4-0.6MPa，需经过滤器除油除水），手动控制电磁阀测试气缸往复运动，检查运动是否顺畅、无卡顿；通过设备控制系统设定运动速度（调节流量控制阀），测试定位精度（使用激光位移传感器测量），确保误差≤±0.1mm；验证磁性开关信号是否正常反馈至控制器，确保位置状态准确识别。
AMAT Applied Materials 0190-77582适配器 英文资料：
Application scenarios and adaptation systems
1. Core application areas
As the "connection hub" of device components, this adapter mainly serves the key links in semiconductor manufacturing that require multi type signal/power adaptation:
RF module signal adaptation: used for connecting AMAT 0041-78374 RF matching components with RF power supplies (such as 0190 series), through N-type SMA interface conversion, to solve the interface difference problem of different RF devices, while reducing RF signal transmission loss through shielding structure, ensuring the power stability of plasma process.
Sensor and controller power/signal adaptation: Connect the device detection sensor (such as vacuum pressure sensor, temperature sensor) with the 0225-01622 controller, amplify the weak signal output by the sensor (such as 0-10mV) into a standard 0-5V signal through the built-in conditioning circuit, and provide stable 5V/12V DC power supply for the sensor to ensure accurate transmission of detection data.
Pneumatic component control signal conversion: adapted to the magnetic switch of cylinder component 3020-00121 and the electronic interface module 0100-20001, through terminal block pin connector conversion, to achieve standardized transmission of magnetic switch NPN signal, while avoiding signal interruption caused by loose wiring, ensuring the reliability of cylinder position feedback.
High voltage module power distribution: In the high-voltage unit of the equipment (such as the electrostatic suction cup high-voltage module), as a power distribution adapter, the 24V DC main power supply is converted into 5V/12V low-voltage power supply to supply power to the internal control circuit of the module. At the same time, overcurrent protection is used to prevent low-voltage circuit faults from affecting the main power system.
2. Adapt devices and systems
Host device adaptation: widely used in AMAT Centura etching systems, Endura deposition platforms, Producer thin film deposition equipment, and wafer inspection equipment.
Compatibility with supporting modules: Directly interface with AMAT 0100 series electronic interface modules, 0190 series RF components, 0225 series controllers, and third-party high-precision sensors (such as Honeywell pressure sensors and Omega temperature sensors) to form a closed-loop connection system of "signal/power input adaptation conversion output".
Collaborative component linkage: It can be linked with the equipment fault diagnosis module. When the adapter detects abnormalities such as overcurrent or signal interruption, it sends a fault signal to the controller in real time, triggers the equipment alarm, and records the fault log, making it easy for operation and maintenance personnel to quickly locate the problem.
4、 Operation standards and maintenance management
AMAT Applied Materials 0190-77582适配器 产品展示
产品视频
3.其他产品
ROLLS-ROYCE 5801-RRDIO15 WB I/O 警报模块
NI CRI0-9073 控制器模块
4.其他英文产品
METSO IOP302 Numerical control module
METSO IOP303 Numerical control module
METSO IOP304 Sequential module
| 6ES5981-0GB11 | 6DD1684-0EB0 | TRICONEX 3706A |
| 6ES5981-0EA11 | 193X741AAG02 | TRICONEX 3663 |
| 6ES5980-3BC41 | 22-8875-004 | TRICONEX 3603T |
| 6ES5980-0AE11 | 30-07420-02 | TRICONEX 3625 |
| 6ES5955-5LB11 | 193X801DAG03 | TRICONEX 3636T |
| 6ES5955-3NC41 | 531X121PCRAAG1 | TRICONEX 3674 |
| 6ES5955-3LF41 | 531X113PSFARG1 | 060-00874-0006 |
| 6ES5951-7ND51 | 76-111301-00 | MC801-200-08 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
