AMAT Applied Materials 3020-00121气缸组件
1.产 品 资 料 介 绍：
- 工艺腔室阀门控制：驱动刻蚀机、PECVD 设备的反应腔真空阀门（如闸阀、蝶阀），通过精准行程控制阀门开度，调节腔室真空度与气体流量，保障工艺环境稳定性。
- 晶圆载台定位：用于晶圆传送腔室内的载台升降、平移机构，通过气缸的高精度定位特性，实现晶圆在传送机器人与工艺腔室间的精准对接，避免晶圆碰撞或位置偏移。
- 舱门与盖板启闭：适配设备维护舱门、工艺腔室盖板的气动启闭机构，结合磁性开关反馈位置状态，确保舱门完全闭合后设备才能启动工艺，防止工艺气体泄漏或真空失效。
- 夹持与顶起机构：在晶圆检测设备中，驱动晶圆夹持爪或顶针机构，实现晶圆的无损伤夹持与顶起，配合传感器完成晶圆厚度、平整度检测等动作。
- 主机设备适配：广泛应用于 AMAT Centura 刻蚀系统、Endura 沉积平台、Track 光刻辅助设备及晶圆检测设备。
- 配套模块兼容：与 AMAT 0225-01622 控制器、0100-20001 电子接口模块、气动电磁阀组（如 AMAT 0020 系列阀岛）直接对接，形成 “控制信号 - 气动驱动 - 位置反馈” 的闭环执行系统。
- 协同组件联动：可与真空传感器、压力开关联动，例如当腔室真空度达标后，气缸驱动阀门开启；若压力异常，立即触发气缸复位，切断工艺通路，保障设备安全。
- 安装前准备：确认安装区域洁净度符合 Class 10 标准，用异丙醇（99.999% 纯度）清洁气缸表面及安装面；检查气缸无划痕、活塞杆无弯曲，磁性开关接线完好；准备专用洁净级气管（如 PTFE 材质，内径 6mm）、扭矩扳手（精度 ±5%）及防静电工具。
- 硬件安装：按设备图纸固定气缸，确保活塞杆轴线与驱动机构中心线同轴度偏差≤0.1mm，避免侧向力导致气缸磨损；连接气管（气管需提前用氮气吹扫 3 次，清除杂质），气管接头采用卡套式连接，扭矩控制在 1.5-2N・m；固定磁性开关，调整其位置至气缸行程两端，确保活塞到达时能稳定触发信号。
- 调试与验证：接入压缩空气（压力调节至 0.4-0.6MPa，需经过滤器除油除水），手动控制电磁阀测试气缸往复运动，检查运动是否顺畅、无卡顿；通过设备控制系统设定运动速度（调节流量控制阀），测试定位精度（使用激光位移传感器测量），确保误差≤±0.1mm；验证磁性开关信号是否正常反馈至控制器，确保位置状态准确识别。
AMAT Applied Materials 3020-00121气缸组件 英文资料：
1. Core application areas
As the "execution gripper" of equipment automation, this cylinder component mainly serves the key links that require precise pneumatic drive in semiconductor manufacturing:
Process chamber valve control: Drive the reaction chamber vacuum valves (such as gate valves and butterfly valves) of the etching machine and PECVD equipment, control the valve opening through precise stroke, adjust the chamber vacuum degree and gas flow rate, and ensure the stability of the process environment.
Wafer stage positioning: used for the lifting and translation mechanism of the stage in the wafer transfer chamber. Through the high-precision positioning characteristics of the cylinder, the wafer is accurately docked between the transfer robot and the process chamber, avoiding wafer collision or position deviation.
Cabin door and cover opening and closing: Adapt to the pneumatic opening and closing mechanism of equipment maintenance cabin doors and process chamber covers, combined with magnetic switch feedback position status, to ensure that the cabin door is completely closed before the equipment can start the process, preventing process gas leakage or vacuum failure.
Clamping and lifting mechanism: In wafer inspection equipment, the wafer clamping claw or top pin mechanism is driven to achieve non-destructive clamping and lifting of the wafer, and to cooperate with sensors to complete actions such as wafer thickness and flatness detection.
2. Adapt devices and systems
Host equipment adaptation: widely used in AMAT Centura etching systems, Endura deposition platforms, Track lithography auxiliary equipment, and wafer inspection equipment.
Compatibility with supporting modules: Directly interface with AMAT 0225-01622 controller, 0100-20001 electronic interface module, and pneumatic solenoid valve group (such as AMAT 0020 series valve island) to form a closed-loop execution system of "control signal pneumatic drive position feedback".
Collaborative component linkage: It can be linked with vacuum sensors and pressure switches, for example, when the chamber vacuum degree meets the standard, the cylinder drives the valve to open; If the pressure is abnormal, immediately trigger the cylinder reset, cut off the process path, and ensure equipment safety.
4、 Operation standards and maintenance management
1. Installation and commissioning process
Preparation before installation: Confirm that the cleanliness of the installation area meets Class 10 standards, and clean the cylinder surface and installation surface with isopropanol (99.999% purity); Check the cylinder for scratches, the piston rod for bending, and the magnetic switch wiring for integrity; Prepare specialized clean grade trachea (such as PTFE material, inner diameter 6mm), torque wrench (accuracy ± 5%), and anti-static tools.
AMAT Applied Materials 3020-00121气缸组件 产品展示
产品视频
3.其他产品
ROLLS-ROYCE 5801-RRDIO15 WB I/O 警报模块
NI CRI0-9073 控制器模块
4.其他英文产品
METSO IOP302 Numerical control module
METSO IOP303 Numerical control module
METSO IOP304 Sequential module
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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