AMAT Applied Materials 0090-09102阀门控制器

AMAT Applied Materials  0090-09102阀门控制器

1.产 品 资 料 介 绍：

AMAT Applied Materials 0090-09102阀门控制器 英文资料：

1. High-density and high-precision signal interaction capability

As a core interface component for digital signal transmission in semiconductor equipment, the core advantage of the 0100-20003 digital I/O board lies in its multi-channel synchronous signal processing performance. Referring to the digital control requirements of AMAT semiconductor equipment, this board card is highly likely to adopt a 16-bit high-speed microprocessor and a dedicated signal processing chip, supporting 32 digital inputs and 32 digital outputs, with a single-channel response time as low as 1μs. It can accurately capture high-frequency control signals and status feedback signals generated by etching machines, thin film deposition equipment, etc. The input side supports a wide voltage range of 5V to 24V, and the output side has a 2A large current drive capability, which can directly drive peripheral devices such as solenoid valves and indicator lights without the need for additional power amplification modules, effectively simplifying the equipment control chain.

Ii. Full system compatibility and interconnection capability

To meet the integration requirements of AMAT's full range of semiconductor equipment, this digital I/O board features seamless cross-platform connection. At the hardware level, it is equipped with dual industrial Ethernet interfaces of EtherCAT and Profinet, with a communication cycle as low as 125μs, and can be directly connected to the AMAT FabWorks production execution system. Realize real-time interaction of control instructions and status data with core devices such as Reflexion CMP equipment and Centris etching systems. At the software level, it is compatible with communication protocols in the semiconductor industry such as SEMI E54 and SEMI E134. Meanwhile, it has built-in AMAT dedicated device drivers, which can communicate directly with the main control unit of the Producer CVD system without the need to develop additional adaptation interfaces. In addition, the board card supports the storage of over 100 sets of device configuration files, allowing for quick switching to meet the signal interaction requirements of different process devices, significantly enhancing the efficiency of device debugging.

Iii. Specialized Protection Design for Harsh Environments

For the complex working conditions of semiconductor cleanrooms and equipment clusters, this digital I/O board highlights strong anti-interference and clean compatibility capabilities in terms of stability and reliability design. It adopts a fully metal shielding housing and an internal four-layer PCB shielding structure, combined with an optimized grounding design, to achieve an electromagnetic interference suppression capability of over 120dB. It can effectively resist the strong electromagnetic radiation generated by the RF power supply of the etching machine and high-voltage equipment, avoiding equipment malfunctions caused by signal transmission interference. The material is selected from 316L stainless steel and high-temperature resistant engineering plastic that comply with SEMI F57 standards. The precipitation of metal ions is less than 0.05ppm, suitable for a Class 10 cleanroom environment. At the same time, it has passed the IP65-level protection certification and can withstand a wide temperature working range from -30 ℃ to 70℃ and a high humidity environment of 90%RH. The structural design adopts fanless sealed packaging to prevent the generation and accumulation of particles, meeting the strict requirements of clean processes such as thin film deposition and photolithography.

AMAT Applied Materials  0090-09102阀门控制器 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218