1.产 品 资 料 介 绍：
AMAT 0190-A1311 power control module (compatible with Endura/Ventura coating machine)
1. Multi channel power distribution control for the cavity, providing unified voltage stabilization and power supply for the robotic arm, valve group, and sensors
2. Multiple independent voltage outputs, single circuit fault power outage does not affect the overall power supply of the machine
3. Automatic protection against overvoltage, overcurrent, and phase loss, quickly cutting off the output power supply in case of abnormalities
4. Moisture proof and anti-corrosion coating for circuit boards, suitable for trace process gas environment in dust-free workshops
5. Real time collection of load power consumption, data upload to the device control system
6. Gold plated wiring terminals, stable connection under long-term constant temperature conditions, and less prone to virtual connection
7. Compact card slot installation, easy to ｒｅｐｌａｃｅ and disassemble the cabinet in situ
8. Built in power-off energy storage components to maintain critical components in standby mode during short-term power outages
9. Comes with EMI shielding to isolate cavity RF power interference and stabilize voltage accuracy
10. Segmented temperature control and heat dissipation, with controllable temperature rise during long-term operation at full load
11. Reserve backup power supply points, which can be expanded to provide power for new components in the future
12. Comes with fault code storage for quick troubleshooting of abnormal power supply points
13. Factory parameter solidification, matched with AMAT original chamber electrical specifications
14. Compliant with semiconductor SEMI safety standards, suitable for 7 × 24-hour mass production in wafer fabs
15. Commonly used as PVD cavity spare parts, it is a regular power supply accessory for production line maintenance
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英文产品
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| 565-5-5-O-B | 6SC9830-0BA02 | NASM02 |
| 565-5-5-O-A-E | 6SC6110-0GA00 | INMMP11 |
| 565-5-5-O-A | 6SC6110-OGB00 | NASI02 |
| 565-5-5-M | 6SC6901-0EA00-Z | NCTM01 |
| 565-5-5-A | 6SC6140-1AG00 | NASM01 |
| 5645-039 | 6SC6101-5B-Z | NCOM03 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
