1.产 品 资 料 介 绍：
SHINKO BX80-070280-11搬运转移机器人 产品英文
SHINKO BX80-070280-11 is a specialized wafer handling robotic arm for Shengang Semiconductor, mainly used for internal wafer transfer operations in dust-free equipment.
1. Four axis telescopic structure, flexible to retrieve and place wafers back and forth inside the cavity
2. High precision servo control, precise positioning, avoiding wafer collision
3. Vacuum adsorption for chip removal, with built-in negative pressure detection to prevent chip dropping
4. The whole machine is dust-free coated to meet the conditions for use in clean workshops
5. Smooth start stop operation with small mechanical vibration amplitude
6. Collision protection function, immediately stop and brake upon accidental touch
7. Dedicated communication interface that can be linked and coordinated with the device master control
8. Power off to retain location data, no need to return to the original point when turning on
9. The body occupies a compact area and is suitable for installation in narrow cavities
10. Wear resistant joint accessories, supporting long-term uninterrupted operation
11. Reserve wiring points for easy external connection of vacuum valves and sensors
12. Built in exclusive program, compatible with Japanese semiconductor process equipment
13. Reasonable heat dissipation design, stable temperature control for continuous operation
14. Automatically store fault information, quick maintenance and problem finding
15. The accessories have good universality and are commonly used replacement parts for production lines
SHINKO BX80-070280-11 is stable and durable, widely used in etching and coating equipment wafer transfer stations.
SHINKO BX80-070280-11搬运转移机器人 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
