1.产 品 资 料 介 绍：
AMAT 0190-B8982电源控制器 产品英文
AMAT 0190-B8982 Power Controller (SCR Power Controller)
AMAT 0190-B8982 is an SCR power controller specifically designed for Applied Materials (AMAT) semiconductor equipment. It is mostly a customized version of the Control Concepts 3096 series and is used for precision heating/power control. It is commonly used in PVD, etching, diffusion and other process platforms.
core parameters
Model corresponding: AMAT 0190-B8982 (original factory code), with Control Concepts 3096-2002A mostly used at the bottom layer.
Control mode: phase angle/zero crossing trigger, SCR voltage and power regulation.
Input voltage: three-phase 200-480VAC, 50/60Hz.
Rated current: 30A (continuous), suitable for heating loads of 10-15 kW.
Control accuracy: ± 0.5% FS, supports 4-20mA/0-10V analog control.
Communication interface: RS-485 (Modbus RTU), supports remote monitoring and setting.
Feedback mode: Voltage/current/power closed-loop, stable power output and anti fluctuation.
Cooling method: forced air cooling, built-in temperature control fan and overheating protection.
Protection functions: overcurrent, overvoltage, overheating, phase loss, load short circuit, fault self-locking alarm.
Working temperature: 0 ℃ -+55 ℃, suitable for semiconductor cleanroom environment.
Structural specifications: 19 inch 3U rack mounted, standard cabinet installation.
Load adaptation: halogen lamp, quartz lamp, resistance heater, infrared heating tube.
Process adaptation: Heating/ESC power control for platforms such as AMAT P5000, Endura, Producer, etc.
Environmental compliance: RoHS lead-free, compliant with SEMI S2 safety standards.
Reliability: Factory aging test for 72 hours, MTBF>100000 hours.
AMAT 0190-B8982电源控制器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
