1.产 品 资 料 介 绍：
AMAT 0190-25527 射频发生器产品特点
- 采用 13.56MHz 标准工作频率
- 额定功率 1250W，功率连续可调
- 50Ω 标准输出阻抗，适配性广
- 功率输出稳定，工艺一致性好
- 支持连续、脉冲两种工作模式
- 配备强制风冷，散热效果出色
- 多重防护设计，运行安全可靠
- 具备反射功率检测与保护功能
- 搭载通讯接口，支持远程管控
- 适应工业洁净室使用环境
- 抗干扰能力强，运行故障率低
- 机架式结构，安装拆装简单
- 耐受轻微腐蚀气体，耐用性强
- 原厂标准工艺，兼容同系列设备
- 经过老化测试，使用寿命长久
AMAT 0190-25527射频发生器 产品英文
AMAT 0190-25527 RF Generator Product Features
AMAT 0190-25527 is a semiconductor specific RF generator with stable output and adaptability to various plasma processes. Its characteristics are as follows:
Adopting the standard operating frequency of 13.56MHz
Rated power 1250W, continuously adjustable power
50 Ω standard output impedance, wide adaptability
Stable power output and good process consistency
Supports both continuous and pulse working modes
Equipped with forced air cooling, excellent heat dissipation effect
Multiple protection design, safe and reliable operation
Equipped with reflection power detection and protection function
Equipped with communication interface, supporting remote control
Adapt to the use environment of industrial cleanrooms
Strong anti-interference ability and low operational failure rate
Rack mounted structure, easy to install and disassemble
Resistant to slightly corrosive gases and strong durability
Original factory standard process, compatible with equipment of the same series
After aging testing, it has a long service life
Overall, the AMAT 0190-25527 RF generator has stable performance and comprehensive protection, making it a high-quality supporting component for semiconductor process equipment.
AMAT 0190-25527射频发生器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
