AMAT 30712650200 射频控制器

AMAT 30712650200 射频控制器 

1.产 品 资 料 介 绍：

AMAT 30712650200 射频控制器

开头

AMAT 30712650200 射频控制器是应用材料半导体刻蚀、薄膜沉积设备专用射频管控单元，精准调控射频功率与阻抗匹配，稳定生成腔体等离子体，保障晶圆工艺一致性。

高精度功率闭环调节，输出功率波动极小，工艺重复性强

内置自动阻抗匹配算法，快速适配腔体负载变化

多路射频信号独立管控，多腔体同步作业互不干扰

搭载高速信号采集电路，实时采集电压、电流、驻波数据

多层 EMI 屏蔽结构，隔绝机台射频、电机电磁干扰

集成过温、过流、过压、驻波过高多重安全互锁保护

原厂专用通讯总线，无缝对接设备主控系统传输工艺参数

工业级宽温元器件，适配无尘车间恒温工况长期运行

板载故障记录存储，留存射频异常日志便于工艺追溯

模块化集成结构，分体拆装，检修更换无需整机停机

优化散热风道，满功率长时间运行温升可控不超限

镀金射频端子接口，降低高频信号传输损耗

支持预设多套工艺配方，一键切换不同制程射频参数

上电完整硬件自检，提前排查线路短路、射频源故障

洁净室防腐防尘壳体，耐受微量工艺腐蚀气体环境

结尾

AMAT 30712650200 射频控制器调节精准、防护完善，是半导体等离子体工艺设备核心射频控制组件。

AMAT 30712650200 射频控制器   产品英文

AMAT 30712650200 RF Controller

beginning

The AMAT 30712650200 RF controller is a specialized RF control unit for semiconductor etching and thin film deposition equipment, which accurately regulates RF power and impedance matching, stably generates cavity plasma, and ensures wafer process consistency.

High precision power closed-loop regulation, minimal output power fluctuations, and strong process repeatability

Built in automatic impedance matching algorithm, quickly adapts to changes in cavity load

Multiple RF signals are independently controlled, and multiple cavities operate synchronously without interfering with each other

Equipped with high-speed signal acquisition circuit, real-time acquisition of voltage, current, and standing wave data

Multi layer EMI shielding structure, isolating machine RF and motor electromagnetic interference

Integrated multiple safety interlock protections for overheating, overcurrent, overvoltage, and high standing wave

Factory specific communication bus seamlessly connects with the main control system of the equipment to transmit process parameters

Industrial grade wide temperature element device, suitable for long-term operation under constant temperature conditions in dust-free workshops

Storage of onboard fault records, retention of RF anomaly logs for easy process traceability

Modular integrated structure, separate disassembly and assembly, maintenance and replacement without the need for complete machine shutdown

Optimize the heat dissipation duct to ensure that the temperature rise during long-term operation at full power is controllable and does not exceed the limit

Gold plated RF terminal interface reduces high-frequency signal transmission loss

Support preset multiple process formulas, one click switch between different process RF parameters

Power on complete hardware self-test, pre check for line short circuits and RF source faults

Clean room anti-corrosion and dustproof shell, resistant to trace process corrosive gas environment

ending

The AMAT 30712650200 RF controller has precise adjustment and complete protection, and is the core RF control component of semiconductor plasma process equipment.

AMAT 30712650200 射频控制器  产品展示

视频展示

中文产品

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SIEGER 05701-A-0329继电器卡

英文产品

CONTACT RATING AG1-SDT1-24U-DEN-A55 Ground Fault Sensor
SIEMENS 6ES7331-1KF02-0AB0 Programming Module
ACS880-07-0725A-3 frequency converter

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218