1.产 品 资 料 介 绍：
MKS 651D-15414 压力控制器产品特点
开头：MKS 651D-15414 是半导体真空工艺专用数字压力控制器，适配节流阀与薄膜规，精准管控腔体真空压力，核心特点如下：
内置自整定 PID 算法，快速锁定设定压力，超调量小
控制重复精度达 ±0.1% FS，制程压力一致性高
双行 LCD 数字显示屏，支持多压力单位自由切换
内置 5 组可存储工艺设定值，一键切换不同配方
配备两路报警继电器，压力异常自动输出联锁信号
兼容 0-5V/0-10V 模拟信号，适配各类上位工控系统
搭载 RS232、TTL 多路通讯接口，远程读写参数便捷
软启动调压功能，减小气流冲击，稳定腔体环境
支持本地、远程两种零点校准，规管校正操作简单
90-264V 宽幅交流供电，适配车间各类供电线路
金属屏蔽线路设计，抵御真空泵射频电磁干扰
标准机架式紧凑型机身，机柜导轨快速拆装
配套驱动 653、253 系列真空节流阀，适配性强
多重过压、过流硬件保护，长时间连续运行稳定
可搭配高温 Baratron 压力传感器，适配高温工艺腔体
结尾：MKS 651D-15414 调压精准、通讯完善，广泛用于镀膜、刻蚀、薄膜沉积半导体真空设备。
MKS 651D-15414压力控制器 产品英文
Product Features of MKS 651D-15414 Pressure Controller
Introduction: MKS 651D-15414 is a digital pressure controller specifically designed for semiconductor vacuum processes. It is compatible with throttle valves and thin film gauges to accurately control the vacuum pressure in the cavity. Its core features are as follows:
Built in self-tuning PID algorithm, quickly locks the set pressure, with small overshoot
Control repeatability accuracy up to ± 0.1% FS, high consistency of process pressure
Dual row LCD digital display screen, supporting free switching of multiple pressure units
Built in 5 sets to store process settings, one click switch between different formulas
Equipped with two alarm relays, automatically outputting interlocking signals for abnormal pressure
Compatible with 0-5V/0-10V analog signals, suitable for various upper level industrial control systems
Equipped with RS232 and TTL multi-channel communication interfaces, remote reading and writing of parameters is convenient
Soft start pressure regulation function reduces airflow impact and stabilizes the chamber environment
Supports both local and remote zero calibration, with simple regulatory calibration operations
90-264V wide AC power supply, suitable for various power supply lines in the workshop
Metal shielded circuit design to resist RF electromagnetic interference from vacuum pumps
Standard rack mounted compact body, quick disassembly and assembly of cabinet rails
Equipped with 653 and 253 series vacuum throttle valves, it has strong adaptability
Multiple overvoltage and overcurrent hardware protection, stable long-term continuous operation
Can be paired with high-temperature Baratron pressure sensors, suitable for high-temperature process chambers
Conclusion: MKS 651D-15414 has precise voltage regulation and complete communication, and is widely used in semiconductor vacuum equipment for coating, etching, and thin film deposition.
MKS 651D-15414压力控制器 产品展示
视频展示
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| PMB32D-00201-00 | AMAT 0110-02336 | P22NRXA-LDN-NS-00 |
| PMB32D-00200-03 | IMBLK01 | 546152 Terminal Block, PKB 20 |
| PMB32D-00200-02 | 07BR60R1 | N32HLLJ-LNK-NS-01 |
| PMB32D-00200-01 | 07NG60R1 | M21NRXA-LNN-NS-00 |
| PMB32D-00200-00 | 07ZB69R2 | N31HRHJ-LKN-NS-01 |
| PMB32D-00116-03 | NIDI01 | 57120001-FS DSTA 140 |
| PMB32D-00116-02 | BE1151 | 57160001-UNG DSTD 110B |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
